IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
IMSE Cleanroom Safety Manual
Key Contacts:
Rahul Gupta (Cleanroom Lab Manager)
Office Location: Rudolph Hall L27A
Phone: 314.935.6774 (O), 302.743.3950 (Cell)
Email: [email protected]
Brad King (EHS Representative)
Phone: 314.935.9262 (O)
Email: [email protected]
Washington University Police /Emergency
Phone: 314.935.555 (Danforth Campus)
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Table of Contents:
A. GENERAL INFORMATION
B. DRESS CODE
C. SIGNS AND LABELS
D. CHEMICAL SAFETY POLICIES
E. HYDROFLUORIC ACID
F. EQUIPMENT POLICIES
G. ALARMS
H. EMERGENCY PREPAREDNESS
I. GAS CYLINDER HANDLING
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
A. GENERAL INFORMATION
(a) Cleanroom Layout with Emergency exits and First Aid Kit information
 The cleanroom is an environment with a controlled level of contamination (e.g.
dust, airborne microbes, aerosol particles, and chemical vapors) used in
manufacturing or scientific research of nano/micro scale devices. In addition, this
highly specialized laboratory has its own dedicated ventilation, environment
controls, and alarm system. A sophisticated hazardous (toxic, flammable, oxidizer,
etc.) gas detection system is located within the cleanroom and it is tied to a
Honeywell HA71 main controller outside the cleanroom.
 Every individual should obey all the safety requirements in place for
chemicals/processes/equipments. If in doubt, STOP the work and contact the Lab
Manager.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
(b)Training
General Training for Lab Entry
 All users must first complete the annual laboratory safety training offered through
the EH&S department. Completion date must be communicated to IMSE Staff and
the lab Blue Book (kept in L52) must be signed.
 All users must complete an annual Cleanroom laboratory specific training
(including reading this Safety Manual) prior to gaining independent access to the
Cleanroom.
 All users must have the user agreement signed by their PI.
 Each user will be given card access to the cleanroom upon completion on above
trainings/requirements.
 It is the users’ responsibility to maintain the above requirements. Lack of any
missing information will immediately suspend the Cleanroom access.
Equipment Specific Training
 Each piece of equipment, including working with chemicals inside the fume hoods,
requires specific training by Lab Manager or designated personnel.
 Each piece of equipment poses safety concerns and requires proper operation
training that adheres to policies and safe practices in place.
 Users without a proper equipment/fume hood/chemical specific training should not
assist his/her colleague.
(c) Access
 Cleanroom normal working hours are from 8 AM – 5 PM (M-F). Users are allowed
to work alone during the normal working hours after making sure Lab Manager
and/or IMSE staff is aware of their presence. Each user should sign-in/sign-out in
the Entry sheet to allow IMSE staff to know who is inside the cleanroom.
 Each user should swipe their card before entering the cleanroom even when
accompanying a colleague.
 Working after-hours (including weekends and holidays) in Class 1,000 and Class
100 bay will require mandatory buddy system. The second user as a buddy should
be a trained Cleanroom user as well. In addition, both users working after hours
will have to sign a waiver form (Appendix –I) before entry and submit it to the
Lab Manager in person.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
 Working after-hours alone in Class 10,000 bay is allowed. Class 10,000 bay does
not contain any chemicals. However, it is recommended to let your PI and/or Lab
Manager be aware of entry into the cleanroom.
 Access to the cleanroom via mechanical rooms and locked hallway doors is
restricted to IMSE staff only.
 Campus staff that have access to the mechanical rooms adjoining the cleanroom
(including building and facilities representatives) should NEVER enter designated
IMSE cleanroom areas unless accompanied by an IMSE staff member or a
designated EHS representative.
(d)Visitors
 Each new visitor requires a safety training before entering the cleanroom. Lab
manager or PI’s are the only ones to accompany new visitors.
 New visitors accompanying a trained Cleanroom user is not allowed.
 Any exceptions should be discussed with IMSE Staff before taking new visitors
inside the cleanroom.
(e) Gowning and Personal Storage
 Each user will wear disposable shoe covers and a hair net before entering the
gowning area. Users with beard must wear a beard net.
 Each user will wear a (re-usable) hood, a garment, and a pair of cleanroom boots in
the class 1,000 and class 100 bays.
 Users may store personal items in one of the lockers outside of the gowning area.
(f) Specific policies
 Any “NEW” chemicals stored in the lab, must be first approved by Lab Manager.
Confirm there is a SDS (or MSDS) for the chemical(s) you wish to bring in. You
are responsible for providing an SDS (or MSDS) if there is no copy in the MSDS
notebook.
 Do not bring Kleenex, card board, or any particle producing products into the
cleanroom. Cleanroom paper and Cleanroom notebooks may be purchasedfor
taking notes inside the cleanroom.
 All approved items that are brought into the cleanroom must be wiped down with
10% IPA in water to remove dust particles and oil.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
 Manipulation (transferring containers, pipetting, etc.) of all chemicals, even nano
materials suspended in liquid, must take place in a fume hood. Nano-Materials are
defined here as any material in solid powder form.
 No eating, drinking or chewing is allowed inside the cleanroom.
(g)Injuries
 All injuries or illness shall be reported to the insurance department (314-935-5547)
for medical treatment authorization, and environmental health and safety
(314.362.6816) for analysis and recommendations for future prevention of the
incident. Complete the report of injury or illness form available at the insurance
department website:
http://www.insurance.wustl.edu or in the blue book.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
B. DRESS CODE
(a) In general, the user’s clothing should be clean and free of dust and debris. Clothing
made of any material that may easily shed fibers inside the cleanroom should be
avoided. This may include clothing made of fur,faux fur or any similar material.
Working around hazardous areas may require additional personal protective clothing
and/ equipment.
(b) Acceptable dress for lab users includes full length skirts and pants and closed toe
shoes. Shorts and Capri pants are not allowed.
(c) Shoes must be clean and dry and free of dust and dirt before entering the cleanroom.
Users must wear closed toe shoes that fully cover the toes, heels, and top of the foot.
(d) Gowns, hair cover, beard net, shoe cover, gloves are provided for maintaining
cleanliness of Cleanroom. Appropriate PPE (such as acid resistant gloves, apron, face
shield, goggles, etc.) is required when handling hazardous chemicals as described
during the lab training.
(e) Safety glasses or goggles are required at all times while in the cleanroom even if you
have regular prescription glasses.
(f) Contact lenses are allowed in the lab.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
C. LABELS
Basic guidelines:
(a) Waste chemical containers shall be labeled using the blue Hazardous Waste labels
available at no cost from EH&S.
(b) Chemicals that are mixed as reagents or that are removed from their primary
containers shall be labeled with the chemical name, concentration, start date, user
name, hazard warning, and target organ information (where relevant).
Example of a label:
AZ-5214E Photoresist (100%)
John Doe
Start Date: 1/1/16
Flammable
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
D. CHEMICAL SAFETY POLICIES
(a) Accidents and spills for all chemicals (excluding chemicals containing
nano-materials)
 Spills of non-hazardous materials may be cleaned with cleanroom wipes or a spill
kit.
If a spill of hazardous and/or volatile materials occurs outside of a fume hood
(i.e. the chemical and/or fumes are uncontained), all lab personnel must leave
the lab immediately.
 Do not attempt to clean up a spill of volatile hazardous waste or a large hazardous
waste spill yourself; you could be exposing yourself to great danger!
 Spills: Call University Police at 935-5555 and give them your location (building
name and room number), your name, the number of the nearest safe phone to call
back on and the nature of the spill---chemical, biological, or radiological. Notify
the lab manager.
 Eye Contact: Promptly flush eyes with water for a minimum period (15 minutes)
and seek medical attention.
 Ingestion: Encourage the victim to drink large amounts of water and seek medical
attention.
 Skin Contact: Promptly flush the affected area with water (15 minutes) and
remove any contaminated clothing. Seek medical attention.
 All injuries or illnesses shall be reported to the Insurance Department (935-5547)
for medical treatment authorization, and Environmental Health and Safety (3626816) for analysis and recommendations for future prevention of the incident.
Complete the Report of Injury or Illness form available at the Insurance
Department website at http://www.insurance.wustl.edu or in the Blue Book.
(b) Accidents and spills for chemicals containing nano-materials
 In a fume hood small spills of nano-materials in a liquid may be cleaned with
cleanroom wipes and/or a spill kit. All materials contaminated with Nano-Materials
should be collected and sealed in a plastic bag while still in the fume hood. Notify
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
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Revision Date: 2/10/2017 Revised By: Rahul Gupta
Lab Manager for proper disposal, noting the type of nano-materials, type of liquid
and any equipment that may have been contaminated.
In a fume hood small spills of dry nano-materials may be cleaned with WET
cleanroom wipes. All materials contaminated with nano-materials should be
collected and sealed in a plastic bag while still in the fume hood. Notify lab
personnel for proper disposal, noting the type of nano-materials and any equipment
that may have been contaminated.
If a spill occurs outside a fume hood all lab users should contact Lab Manager and
leave the lab. Do not attempt to clean up a spill of nano-materials outside of a fume
hood yourself; you could be exposing yourself to great danger!
In the event that your lab coat or clothing is contaminated with nanomaterials
remove the contaminated clothing and place in a large plastic bag.
Eye Contact: Promptly flush eyes with water for a minimum period (15 minutes)
and seek medical attention.
Ingestion: Encourage the victim to drink large amounts of water and seek medical
attention.
Skin Contact: Promptly flush the affected area with water (15 minutes) and
remove any contaminated clothing. Seek medical attention.
All injuries or illnesses shall be reported to the Insurance Department (935-5547)
for medical treatment authorization, and Environmental Health and Safety (3626816) for analysis and recommendations for future prevention of the incident.
Complete the Report of Injury or Illness form available at the Insurance
Department website at http://www.insurance.wustl.edu or in the Blue Book.
(c) Avoidance of "routine" exposure
Develop and practice safe habits that avoid unnecessary exposure to chemicals by any
route:
 Do not smell or taste chemicals.
 Vent apparatus that may discharge toxic chemicals (vacuum pumps, distillation
columns, etc.) into local exhaust devices.
 Use a fume hood with sash lowered whenever possible.
(d) Choice of chemicals
Use only those chemicals for which the quality of the available ventilation system is
appropriate.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
 Know about the chemicals you work with by reading SDS (or MSDS) for detailed
information. A SDS (Safety Data Sheet) or MSDS (Material Safety Data Sheet) is
to be supplied by the user. The SDS (or MSDS) binder is located in the cabinet
with the Blue Book.
 All chemicals and samples brought into the lab must be clearly labeled with user
name, group (supervisor) name, contact information (email or phone number),
chemical name, and the fill date.
 No open containers of liquids are permitted in the storage cabinets or fume hoods.
 Collect all hazardous waste in the appropriate waste containers located in the
solvent and acid fume hoods. Do not mix different waste types.
 Make sure you DO NOT use the solvent hood for acid operations, and vice
versa.
 Clean up any countertop spills immediately.
 Dispose of contaminated labware and consumable supplies in appropriately labeled
waste containers.
 Dispose of sharps (glass slides, silicon wafers, needles, blades, etc.) in labeled
sharps containers only.
 Select chemical carcinogens shall only be used in the designated areas. In this
laboratory, the designated areas are the chemical fume hoods.
(e) Eating, drinking, smoking, etc.
 Eating, drinking, smoking, handling contact lenses and applying cosmetics is
strictly prohibited in areas where hazardous laboratory chemical or biological
materials are used or are intended for use.
 Storage of food and beverage in containers or in areas that are intended or are used
for storage of hazardous laboratory materials is prohibited.
(f) Equipment and glassware
 Handle and store laboratory glassware with care to avoid damage.
 Inspect glassware before each use and do not use damaged glassware.
 Use extra care with Dewar flasks and other evacuated glass apparatus. Shield or
wrap them to contain chemicals and fragments should implosion occur.
 Use equipment only for its designed purpose (See Equipment Policies below).
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
(g) Exiting
Remove gloves and/or wash areas of exposed skin well before exiting the laboratory.
Do NOT touch the door handle if you are wearing gloves!
(h) Horseplay
Avoid practical jokes or other behavior that might confuse, startle or distract another
worker.
(i) Mouth pipetting
Do not use mouth for pipetting or starting a siphon.
(j) Personal apparel
Confine long hair and loose clothing. See Dress Code.
(k) Personal housekeeping
Keep the work area clean and uncluttered, with chemicals and equipment properly
labeled and stored. Clean up the work area on completion of an operation and at the
end of each day.
(l) Personal protection
Assure that all persons, including visitors, wear appropriate eye protection where
chemicals and biological agents are stored or handled.
 Wear appropriate gloves when the potential for contact with toxic materials exists.
Inspect the gloves before each use and replace them periodically or when damaged.
If handling Nano-Materials in the hood, dispose of gloves in a separate waste
container inside the fume hood. If no container is present, contact the Lab Manager
for assistance.
 Nitrile gloves (small, medium, large and X-large) are available in the lab.
 Use appropriate respiratory equipment when air contaminant concentrations are not
sufficiently restricted by engineering controls. The Environmental Health and
Safety Office will determine if respiratory protection is required.
 Use any other protective and emergency apparel and equipment as appropriate.
 Remove laboratory coat or cleanroom gown immediately upon significant
contamination and place in bin for washing.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
(m) Planning
Seek information and advice about hazards before starting an experiment. Plan
appropriate protective procedures, and positioning of equipment before beginning any
new operation.
(n) Unattended operations
Leave lights on, place an appropriate sign on the door, and provide for containment of
toxic substances in the event of failure of a utility service (such as cooling water) to
an unattended operation.
(o) Use of fume hood
Use the fume hood for operations that might result in release of toxic chemical vapors
or dust or when handling nano-materials.
 As a rule of thumb, use a fume hood or other local ventilation device when working
with any appreciably volatile substance with a TLV (Threshold Limit Value) of
less than 50 ppm.
 Confirm adequate fume hood performance before use. Keep the fume hood sash
closed at all times except when adjustments within the fume hood are being made.
 When using a horizontal sash fume hood a glass panel should be between your face
and the interior of the fume hood with just enough clearance for your arms between
panels during operations. When using a vertical sash fume hood the sash should be
lifted only high enough to allow your arms to enter the hood (~6” to 12”).
 Keep materials stored in fume hood to a minimum and do not allow them to block
vents or airflow. Hazardous materials should be at least 6 inches behind the sash of
the fume hood.
 Leave the fume hood "on" when it is not in active use if toxic substances are stored
in it or if it is uncertain whether adequate general laboratory ventilation will be
maintained when it is "off.”
 NEVER leave any liquid-filled container in a hood without a label. The label must
provide the following information: the container’s contents, user name, supervisor
name, expected time of disposal, and a phone number where you can be reached if
there are questions.
 All un-attended chemicals (including custom prepared solutions) in the fume hood
require permission from Lab Manager.
 No chemicals, glassware, etc., should be left in fume hoods, or benches.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
(p) Vigilance
 Be alert to unsafe conditions and report them to lab personnel.
(q) Waste disposal
 Dispose of liquid hazardous chemical waste in appropriately labeled (EH&S blue
unwanted material) receptacles.
 Do not discharge any chemical waste to the fume hood drain including resist,
developers, acids, bases, solvents, or bases. Other prohibited substances that are not
allowed in the fume hood drain include highly toxic, malodorous, or lachrymatory
substances; or any substances which might interfere with the biological activity of
waste water treatment plants, create fire or explosion hazards, cause structural
damage or obstruct flow. For all drain disposal questions, contact the Lab Manager.
 Only pure water is allowed to be safely washed down the drain.
 Gloves, wipes and other clean-up materials contaminated with Nano-Materials
should be disposed of in a waste container inside the fume hood. Do NOT place it
outside the fume hood in a regular trash. If assistance is needed in providing waste
container, contact the Lab Manager.
 Only chemicals listed on the respective chemical disposal sheet is allowed to be
added to the waste container. Request lab manager assistance if a chemical is not
listed. Do not make assumptions here.
(r) Cleanroom Working hours
 Normal working hours (M-F, 8 AM – 5 PM) unless approval from Lab Manager.
 Do not work alone in the lab at all times. Exceptions can be made for nonhazardous process during normal hours and with Lab Manager/IMSE Staff present
near the Cleanroom area.
 Certain hazardous cleanroom process (such as working with acids or working on
RIE etching tool) require the buddy system. The Lab Manager should be informed
in advance before performing such tasks either alone or with the buddy system.
 Operation of ALL equipment in CR 100/1000 or doing ANY process after regular
hours requires an approval from Lab Manager and presence of at least two
authorized Cleanroom users (buddy system) in Cleanroom during all times. In
addition, for after-hours usage Acid hood the access key needs to be obtained from
lab manager and log sheet should be updated (Appendix –II).
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
 Operation of ALL equipment in CR 10,000 after regular work hours is allowed.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
E. Hydrofluoric Acid Use
(a) Hydrofluoric Acid (HF) – Hydrofluoric acid presents a significant hazard! Special
training is required before using HF inside the cleanroom. Additional training is
required when handling 1 Gallon or highly concentrated storage bottles.
(b) Any Acid chemical use or Acid Hood Use will require additional training with sign
off. (See Appendix - III)
(c) HF is used in the cleanroom in both pure (48%) and diluted form. It is also an active
component of Buffered Oxide Etch (BOE) and is used for etching silicon dioxide or
for stripping the native oxide growth prior to subsequent processing steps. HF is
dangerous because a person may not notice an HF “burn” initially. The acid will eat
away the flesh until it reaches the bone causing extreme pain.
(d) Working with HF and/or preparing a fresh solution from a large bottle require the use
of buddy system in the lab. The buddy should be trained in HF safety and its usage as
well.
(e) Working with HF after hours is strongly discouraged. The response time of IMSE
Staff and Medical support could be delayed in case of emergency.
(f) Because HF etches glass, it MUST NOT be kept in a glass bottle or used in glass
beakers or disposed of in a glass waste container! Always use HF resistance lab ware
(such as based on PFA) when handling HF or BOE.
(g) Regardless of the concentration of HF, it CANNOT be disposed down the drain!
Collect HF waste in the labeled HF waste container only. Glass and metal are
unsuitable containers. Do not mix non-HF acids with the HF waste.
(h) HF must be used only in the HF (and BOE) designated area inside the acid fume
hood. Only the clean, DI water washed wafers without HF can be brought out of
the hood. Acid resistant gloves are to be only used in the acid hood. Using it in
other hoods while working with HF can potentially contaminate other hood/lab
areas with HF as well.
(i) Neoprene gloves are available to protect skin from HF acid. Double glove when
handling HF (nitrile gloves then neoprene gloves on the outside).
(j) NOTE: Nitrile gloves are not compatible with HF.
(k) Always use the FULL FACE SHIELD, ACID APRON, and double glove
(Neoprene over Nitrile) when using HF or BOE. Ensure the gloves and other PPE
are in good working condition.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
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Revision Date: 2/10/2017 Revised By: Rahul Gupta
(l) If you are exposed to HF, use calcium gluconate as an antidote. This is kept in the
First Aid kit and the Fume Hood.
(m) Users should seek medical attention immediately and notify IMSE staff upon
ANY exposure to HF. Follow the proper notification steps indicated in Section D
above.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
F. EQUIPMENT POLICIES
Basic guidelines:
(a) The equipment in the IMSE facilities is under the responsibility of the staff members.
These staff members are responsible for the maintenance, training, and process
development. Each tool has a training document or instructions for its use. Users
should make sure that they are thoroughly trained on equipment before they operate
it. Staff members are available for training sessions on equipment via an online
training request form.
(b) No alterations of any kind should be done to the tools or the engineering control
devices in place to ensure safe operation. If a user has trouble or notices a mechanical
failure of a tool, this should be brought to the immediate attention of IMSE staff.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
G. ALARMS
Two main types of alarms exist in Cleanroom:
(a) Fire Alarm
- Users should exit the lab and building using Emergency Exit doors immediately.
(b) Toxic gas or Oxygen depletion gas alarm
- Number of toxic/flammable/oxidizing gases (such as NF3, Cl2, BCl3, etc.) and inert
gases (such as O2, N2, Ar, CF4, SF6, etc.) are used in the cleanroom. Most of these
gases are used kept in Gas storage bay and used for the Oxford RIE instrument.
 Honeywell Digital Gas controller (HA71) provides real-time readings of ALL gas
detectors (MIDAS) and is located in the hall outside the main cleanroom entrance.
The gas controller is programmed with multiple alarm levels for each gas line and a
complete list of gas sources and currently monitored gas detectors is included below.
Any change in the list of gas sources or gas detectors will be updated in the binder
kept near the main cleanroom entry/exit area.
 The gas system is engineered to have built-in safety redundancies that both close the
gas lines near the source and vent any gases through the exhaust system. However,
engineering controls cannot completely eliminate the potential risk of exposure to
toxic chemicals that may occur in unusual circumstances.
 Gas sensors are typically installed for highly toxic gases and/or highly flammable
gases. Non-flammable and/or non-toxic gases will be only monitored for asphyxiation
(i.e. O2 depletion) by Oxygen gas sensor.
 In the event of an abnormal gas condition that is NOT dangerous the multicolored
alarms in the cleanroom and gas service chase will flash orange.
 In the event of an abnormal gas condition that is DANGEROUS (hazardous gas leak,
oxygen depletion or oxygen enrichment) the multicolored alarms in the cleanroom
and gas service chase will flash RED and an alarm will sound. Additional alarms
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IMSE Cleanroom Safety Manual
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connected to the gas sensors in the service chase will also sound and flash red and an
additional red strobe alarm in the cleanroom will flash and sound.
Alarm locations
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IMSE Cleanroom Safety Manual
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Gas source and corresponding gas detector locations (including maintenance schedule
sheet)
Last updated:
Nov 11, 2016
Rahul Gupta
H2
xx
16
Liq. N2
He
Ar
CF4
xx
05
Mechanical Room
CH4
Gas service bay
xx
04
xx
03
CHF3 SF6 NF3
Cl2 HCl
01 02
BCl3 HBr Cl2
xx HCl Cl2 LEL O2
06 07 08 09 10
xx HCl xx
15 12 13
xx
14
CR 1000
xx
11
O2
CR 1000
LEGEND:
Gas cylinder
Gas cabinet
Active sensor
(Top row - Gas sensor name
Bottom row – HA71 ID)
O2
10
Inactive sensor
xx
08
O2
Hallway
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Cleanroom Gowning Area
CR 100
IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Gas
sensor
Name -ID
Location
Sensor
life
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Last replacement
log
2 yr
Sep 2016
Near RIE tool
5 yr
~2013
HCl – 07
Near RIE tool
2 yr
~2015
xx – 06
Near RIE tool
Cl2 – 08
Near RIE tool
2 yr
~2015
xx – 14
Gas Bay area
xx – 13
Gas Bay area
HCl – 12
Gas Bay area
2 yr
Oct 2016
xx – 15
Gas Bay area
xx – 04
NF3/CHF3/SF6 Gas
cabinet
xx – 03
NF3/CHF3/SF6 Gas
cabinet
HCl – 02
BCl3/HBr/Cl2 Gas
cabinet
2 yr
~2016
Cl2 – 01
BCl3/HBr/Cl2 Gas
cabinet
2 yr
~2016
xx – 16
H2 Gas cabinet
LEL – 05
CH4 Gas cabinet
5 yr
~2013
O2 – 10
Near RIE tool
xx – 11
Near RIE tool
LEL – 09
Record bump/calibration data
Comments
Last updated:
Nov 11, 2016
Rahul Gupta
Actively monitored gas sensors are shown in red color
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Gas
sensor
Name -ID
Location
Gas
Monitored
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Gas Alarm set points
(Orange level)
Gas Alarm set
points (Red
level)
Comments
O2 – 10
Near RIE tool
< 19%
xx – 11
Near RIE tool
LEL – 09
Near RIE tool
H2, CH4
> 50% LEL
HCl – 07
Near RIE tool
BCl3, HBr, Cl2
> 3 ppm
xx – 06
Near RIE tool
Cl2 – 08
Near RIE tool
xx – 14
Gas Bay area
Earlier used for NF3, Red alarm at 10 ppm
xx – 13
Gas Bay area
Earlier used for H2/CH4, Red alarm at 50%LEL
HCl – 12
Gas Bay area
xx – 15
Gas Bay area
Earlier use for Cl2. Red alarm at 2 ppm
xx – 04
NF3/CHF3/SF6
Gas cabinet
Earlier used for NF3, Red alarm at 10 ppm
xx – 03
NF3/CHF3/SF6
Gas cabinet
Earlier used for SF6, Red alarm at 1000 ppm
HCl – 02
BCl3/HBr/Cl2
Gas cabinet
BCl3, HBr, Cl2
> 3 ppm
Cl2 – 01
BCl3/HBr/Cl2
Gas cabinet
Cl2
> 2 ppm
xx – 16
H2 Gas cabinet
LEL – 05
CH4 Gas
cabinet
Earlier used for SF6, Red alarm at 1000 ppm
Earlier used for NF3, Red alarm at 10 ppm
Cl2
BCl3, HBr, Cl2
> 2 ppm
Will be removed in future.
> 3 ppm
Will be removed in future.
Earlier used for H2/CH4, Red alarm at 50%LEL
CH4
> 50% LEL
Last updated:
Nov 11, 2016
Rahul Gupta
Actively monitored gas sensors are shown in red color
Depending on the severity of Toxic gas or Oxygen detection, gas alarm indicator has two
states:
a) Low level alarm (Orange light and Audible signal on Detector)
- In this alarm level, the potential gas leak is detected by a gas detector. However,
the gas leak is below the Threshold limit Value (TLV), which is obtained from
Safety Data Sheet.
The threshold limit value (TLV) of a chemical substance is a level to which it is
believed a worker can be exposed day after day for a working lifetime without
adverse effects – Source Wikipedia
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
b) High Level alarm (Red light and Audible signal on Detector)
- In this alarm level, the potentially serious gas leak is detected by a gas detector.
The measured leak is has a value of Threshold limit Value (TLV) or higher. This
level require immediate evacuation of the cleanroom.
These gas detectors can also be monitored from Honeywell HA71 Controller located
near the main cleanroom entry/exit doors. Any gas detection results in a text, email or
call to following personnel: Cleanroom lab manager (Rahul), Facility Zone Manager
(Diane). Remote dialer to WUPD is in process of being implemented.
IMSE staff will maintain and inspect the gas detectors per manufacturer
recommendations.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
H. EMERGENCY PREPAREDNESS
Fire alarm
- In case of fire alarm, exit the cleanroom and building immediately using exit doors
and assemble at the assembly point #21
https://emergency.wustl.edu/where-to-go/#evacuation
IMSE
Cleanroom
- Do not leave the assembly point area until WUPD has arrived and has recorded
your details, including your knowledge of other researchers working at same time,
experiments, etc.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
- In case of small fire in the cleanroom and if you are comfortable to do so, use the
fire extinguisher to extinguish the fire.
- In case of large fire in the cleanroom, do not try to extinguish it by yourself
especially related to electricity or where chemical reaction may be involved. Pull
the building fire alarm and leave the cleanroom/building immediately. Assemble
at meeting point #21 as shown above.
Low level Gas alarm (Orange light and audible signal on Detector)
- Cleanroom users should stop their experiments immediately and leave the
cleanroom through normal exit doors in gowning area.
- Users should inform the lab manager (or other IMSE staff members) at the phone
number posted near the lab.
- Cleanroom users must assemble on the first floor of Rudolph hall near the
elevator. Do not leave this assembly point area until IMSE staff has arrived and has
recorded your details, including information on other researchers working at same
time, experiments, etc.
- Depending on the severity, trained IMSE staff may diagnose the source of gas
alarm either alone or by working with necessary team (WUPD, EHS, Facilities).
IMSE staff may keep a spare gas detectors for troubleshooting and entering the
hazardous area cautiously.
High level Gas alarm (Red light and audible signal on Detector)
- Cleanroom users should stop their experiments immediately and leave the
cleanroom through Emergency exit doors or through any of the doors in the main
entry near the gowning room. Exiting the cleanroom under a High Level Alarm
through the service chase must be avoided.
- Cleanroom users should not wait in gowning area to un-gown during a High Level
Alarm.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
- Users should inform the lab manager (or other IMSE staff members) at the phone
number posted near the lab.
- Cleanroom users must assemble on first floor of Rudolph hall near the elevator.
Do not leave this assembly point area until IMSE staff has arrived and has
recorded your details, including information on other researchers working at same
time, experiments, etc.
- IMSE staff will ALWAYS CALL WUPD and work under their supervision and/or
members of EHS, Facilites, etc.) to investigate the source of alarm. NOTE: This
applies even for the potential faulty alarm from a gas detector. WUPD may direct
fire marshal to take over the scene. Remote dialer to WUPD is in process of being
implemented.
- Fire alarm may be initiated at the discretion of Cleanroom users, IMSE staff and/or
WUPD and meeting at the assembly point #21
https://emergency.wustl.edu/where-to-go/#evacuation
- If you believe someone has collapsed in the cleanroom area DO NOT attempt to
retrieve them! Call WUPD at 935-5555 and request a Hazmat team.
- DO NOT attempt to diagnose and alarm condition or turn off an alarm on your
own. Only Lab Manager and/or other trained personnel from EHS, IMSE, and
theFacilities team are allowed to respond to the situation.
- IMSE staff members and Responders (including WUPD) will consult the Honeywell
HA-71 Controller located outside the cleanroom to investigate the source and
location of the leak. NOTE: This may not be a safe breathing area if the gas leak in
CR 100/CR1000 area has been confirmed.
o IF THE LEAK IS OUTSIDE OF THE GAS CABINET - IMSE staff will place a sign
warning people that a gas leak or hazardous condition exists and not to
enter the hall from the stairwells..
o IF THE LEAK IS INSIDE A GAS CABINET – The system automatically shuts off
the gas flow regulator directly after the hose connecting the cylinder.
Responders should wait until the levels drop to a safe level before entering
the cleanroom or the service chase.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
- IMSE staff may keep a spare gas detectors for troubleshooting and entering the
hazardous area cautiously. This should be done under WUPD supervision.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
I. GAS CYLINDER HANDLING
- All personnel handling the cylinder and its connections (including CGA, piping,
etc.) should have EHS certified gas handling training or trainingfrom the gas
manufacturer. Improper gas connection pose serious hazard to operators and
nearby personnel.
- Cylinder installation will be done as per recommendations in manufacturer
cylinder change procedures.
- If a cylinder of a particular gas is not planned in the future, cylinder valve will be
closed and locked out. Only the owner of the lock is allowed to open the lock. The
gases will purged out from the gas lines.
o Gas sensor for a particular gas source may not need to be monitored. If so,
the active gas sensor sheet near the Honeywell HA71 controller will be
updated.
- No toxic/flammable/hazardous cylinder will be kept in non-exhausted area.
- Delivery and Pick Up
o All front office staff should be given advanced notice from IMSE staff that
toxic gases have been ordered and are expected to be delivered.
o When gases are delivered to site they should be accepted only by IMSE staff.
o Gas cylinders should be immediately placed in the appropriate cabinet and
secured with the strap.
o All empty toxic gas cylinders will remain in their respective gas cabinet,
secured with the strap, until they are picked up for return.
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Appendix – I: Waiver form for working after hours (including weekends and holidays)
We _______________ and _______________ request permission to work inside the
cleanroom on (Day) _________ from (Time) ______to _______. We are both trained
cleanroom users and plan to work on the following process (describe
equipment/chemicals/hood operation) _______________________________________
_______________________________________________________________________
If a key is borrowed for specific locked instrument, it will be returned to the Lab
Manager or IMSE staff the following working day. We are aware that after workhours
are not monitored by IMSE staff and there can be a delay in any support including
medical assistance, if required. IMSE Staff will not be responsible for any incident (or
accident) that occurs after hours. In case of emergency, campus police 935-5555 will be
communicated first followed by Lab Manager and other IMSE Staff.
User I Name:
User I Email:
User I Ph. No:
PI Name:
Company name (if external):
User II Name:
User II Email:
User II Ph. No:
PI Name:
Company name (if external):
Date:
Sign:
Date:
Sign:
(This form is valid only if submitted in person to Lab Manager)
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IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Appendix – II: Acid Hood Key check out log (only for after-hours usage)
Date
Time
(start to
finish)
Activity Planned
Primary
User Name
31
Buddy
User Name
PI Name
IMSE Cleanroom Safety Manual
IMSE Micro and Nanofabrication Center
Revision No.: 08
Revision Date: 2/10/2017 Revised By: Rahul Gupta
Appendix – III: Acid Hood Usage Training record
I__________________________ request permission to work inside the cleanroom and use the Acid hood for
wet etch applications. I have read the Cleanroom safety manual, Cleanroom safety presentation, Safety Data
sheet of Chemicals, Waste handling procedures and I am aware of the safety protocols in place such as Fume
Hood, PPE, Safety shower, Material compatibility, etc. In addition, I will wear additional PPE (Apron, Safety
Shield, Acid resistant gloves) for any work unless exception has been granted in writing. The buddy system is
required with certain hazardous chemicals. In cases when buddy system is not required, researcher should
inform Lab manager or IMSE staff before starting his/her work in Acid hood.
My handling of chemicals will by default be limited to the solutions prepared by Lab Manager and will be
carried out in a secondary tray. Typically, these solutions will be in the amount of no more than 500 ml. If I
need to handle larger amounts, I will request Lab Manager Assistance or ask for additional training. Handling
large container (when trained) will require buddy presence. Default usage will also be limited to Lab Manager
provided compatible containers, tweezers, etc. No heating or stirring is allowed unless approved by Lab
Manager.
List of chemicals granted access to:
Chemical Name
Additio
nal PPE
Container Info
Allowed to
Heating/ Buddy
handle large Stirring
System
container
required
Other comments:
Name:
Email:
PI Name:
Company or University Name (of external):
Sign:
Date:
(This form is valid only if submitted in person to Lab Manager)
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