Performance Solutions
K-T SERVICES
For leading edge factories where
productivity and performance
are essential
Performance Solutions
Performance
Solutions
K-T SERVICES
MANAGING TOOLS THROUGH THE LIFE STAGES
KLA-Tencor tools, as with all semiconductor capital equipment, typically undergo three stages during their life. KLA-Tencor Services is
committed to meeting the customer’s evolving requirements as their tool moves through the life stages by providing Performance Solutions
and Lifecycle Solutions:
Stage I-New Platforms
Stage II-Mainstream Platforms
Customer Challenge
Maximize fab output by improving tool
Overall Equipment Effectiveness (OEE)
Stage III-Mature Platforms
Customer Challenge
Customer Challenge
Maintain fab output while balancing
tool cost of ownership
Reduce service cost per tool and
manage risk
PERFORMANCE SOLUTIONS
ƒƒMaximize tool uptime (availability)
ƒƒTool matching
ƒƒMaximize overall productivity
LIFECYCLE SOLUTIONS
ƒƒReduce service costs
ƒƒMaintain productivity
ƒƒManage risk and cost overruns
PERFORMANCE SOLUTIONS
Our Performance portfolio of service agreements support leading edge 300mm, mask, and wafer factories where productivity and
performance are essential. The Performance portfolio is offered in Full, Plus and Premium configurations – providing a solution for
every service level required.
The Premium and Plus performance packages offer KlearPointTM. KlearPoint allows you to monitor the productivity of your fleet of
tools automatically, from a web interface, complementing your MES system by automatically capturing, binning and reporting
system-generated performance diagnostics.
Productivity and Performance
PREMIUM
PERFORMANCE
FULL
PERFORMANCE
High uptime
PLUS
PERFORMANCE
Guaranteed higher uptime
Guaranteed higher uptime
Tighter matching spec
Tighter matching spec
Improved MWBI
Improved recipe success
Matching to original spec
For leading edge factories
where productivity and
performance are essential
Service Level
KLA-Tencor Services, in support of KLA-Tencor’s inspection and metrology tools, enable customers to realize
their required productivity and performance at the lowest overall cost. Only KLA-Tencor Services delivers the
expertise and support infrastructure needed to service
highly complex systems — ensuring customers achieve
required uptime and matching with uncompromised
sensitivity and precision.
KLA-TENCOR SERVICES:
Delivers the expertise to service highly complex inspection
and metrology systems
Ensures customers achieve the required uptime and
matching with uncompromising sensitivity and precision
Provides a broad portfolio of service agreements to
meet the requirements of both leading edge and
mature factories
CHOOSE YOUR PACKAGE AND SERVICE LEVEL TO MEET YOUR NEEDS
HIGHER SERVICE LEVEL =
HIGHER UPTIME WITH LESS VARIATION
FULL
PERFORMANCE
PLUS
PERFORMANCE
PREMIUM
PERFORMANCE
Improved recipe success
•
Improved MWBI
•
Guaranteed higher uptime
•
•
Tighter matching specs
•
•
KlearPoint
•
•
Priority escalation
•
•
7x8 coverage as required
•
•
Majority of parts delivered ≤ 4 hrs
•
•
Optimized local parts stock
•
•
Annual customer equipment/applications training
•
•
TM
High uptime
•
•
•
CIP for hardware and software updates
•
•
•
≤ 4 hrs response time
•
•
•
100% parts and technical expert coverage included
•
•
•
Matching to original spec
•
•
•
5x8 coverage
•
Majority of parts delivered ≤ 24hr
•
KLA-TENCOR SERVICE and SUPPORT
Customer service is an integral part of KLA-Tencor’s portfolio that enables our customers to
accelerate yield. Our extensive customer service organization collaborates with customers
worldwide through the life stages of their factory and tools to achieve the required productivity
and performance at the lowest overall cost.
© 2009 KLA-Tencor Corporation. All brands or product names may be trademarks of their respective companies.
KLA-Tencor reserves the right to change the hardware and/or software specifications without notice.
KLA-TENCOR CORPORATION
One Technology Drive
Milpitas, CA 95035 phone (+1) 408 875 3000
www.kla-tencor.com
Printed in the USA
PB-KTS-P-09/09