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ILS-LM Series
AR
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For Motion, Think Newport
Compliant
F I C ATI O
HIGH-PERFORMANCE LINEAR MOTOR STAGES
The ILS-LM series linear motor stages are designed for self-supporting applications with
travel ranges from 100 mm to 300 mm. The stages feature a robust design with high
performance but with low cost, making them cost-effective solutions for precision
industrial applications such as semiconductor wafer inspection, micro-electronics test and
assembly, pick and place, DNA sequencing, or laser machining.
Based on industry proven technology of the ILS, the ILS-LM series utilizes an FEMoptimized extruded aluminum body that is extremely stiff, while minimizing the bending
effect caused by the different thermal expansion coefficients of the aluminum body and
the steel rails. The rails' position relative to the profile’s neutral fiber minimize the effect
due to bi-metal thermal expansion. The body's rigidity minimizes the deflection under load.
• Travel: 100, 200 and 300 mm
• 3-Phase synchronous ironless linear motor with linear
steel scale
• Minimum Incremental Motion: 10 nm
• Max. speed: 500 mm/s
Unlike screw driven stages, the ILS-LM employs a centered, high efficiency 3-phase,
synchronous ironless, linear motor as the driving element. This drive system is absolutely
noise-free and has the advantage of higher speed, high acceleration and high system
responsiveness without wear associated with motor brushes or drive screws. And because
of the fully integrated linear motor, the ILS-LM is more than 150 mm shorter than a
comparable screw driven stage. Thus, the ILS-LM is the optimum solution for space
constrained applications that require high-throughput, high reliability, and ultra-quiet
operation.
Recirculating ball bearing slides provide excellent payload capabilities and long life. The
movement is smooth with low noise.
Design Details
Base Material
Bearings
Drive System
FEM-Optimized Extruded Aluminum
Recirculating bearings
3-phase synchronous ironless linear motor
(without Hall effect sensors)
Motor Initialization Done by the XPS controller.
The XPS controller uses an initialization routine
to limit the stochastic motion of stages
Motor Commutation Done by the controller on encoder feedback
Feedback
Linear steel scale, 20 µm signal period, 1 Vpp
Limit Switches
Optical
Home Switch
Optical, on encoder’s fiducial track, located at
center of travel
Cable
5 m long cables included
MTBF
20,000 hours
Precision position feedback is supplied by a very repeatable linear scale mounted in the
stage. The encoder signals are interpolated by Newport’s XPS motion controller with
nanometer resolution for outstanding position sensitivity, repeatability, and stability. A
home position is incorporated on the same scale, avoiding the use of additional electronics
or mechanics for improved reliability and accuracy.
Specifications
Travel Range (mm)
Minimum Incremental Motion, Linear (µm)
Uni-directional Repeatability, Guaranteed (1) (µm)
Bi-directional Repeatability, Guaranteed (1) (µm)
On-Axis Accuracy, Guaranteed (1) (2) (µm)
Maximum Speed (mm/s)
Maximum Acceleration, No Load (m/s2)
Max. Force (Cont.) (N)
Max Force (Peak) 4 s (N)
Pitch, Yaw, guaranteed (1) (2) (4) (µrad)
Load Capacity (N)
1)
100, 200, 300
0.01
0.45
0.7 or ±0.35
5 or ±2.5
500 (3)
20
15
30
300 or ±150
250
Shown are peak to peak, guaranteed specifications or ± half the value. The typical specifications are about 2X better
than the guaranteed values.
2) For a travel of 300 mm.
3) With a 44 V driver (such as the XPS-DRV02 board of the XPS controller).
4) To obtain arcsec units, divide µrad value by 4.8.
Z
XPS
XPS-DRV02
Q
D
Recommended Motion Controllers/Drivers
Available in 2, 4, 6 or 8-axis versions
PWM drive for brushless motors
Y
X
Cz
Ordering Information
Load Characteristics
Model
(M-)ILS100LM
(M-)ILS200LM
(M-)ILS300LM
Cz, Normal center load capacity on bearings
kαx, Angular stiffness (Roll)
kαy, Angular stiffness (Pitch)
kαz, Angular stiffness (Yaw)
Q, Off-center load
D, Cantilever distance in mm
Description
Linear motor stage, 100 mm travel
Linear motor stage, 200 mm travel
Linear motor stage, 300 mm travel
Note: (M-) for metric versions.
250 N
15 µrad/Nm
10 µrad/Nm
10 µrad/Nm
Q ≤ Cz/(1 + D/60)
Dimensions
1.18
(30)
C
4.72
(120)
1.18
(30)
C
(M-)ILS-LM Stages Top Plate Interface
3.0 (75)
4 HOLES M4 THD ON ø4.45 (113),
EQUIDISTANT AT 90°,
DEPTH: .31 (8)
1.0 (25)
EACH SIDE:
2 HOLES M4 THD,
DEPTH: .31 (8)
.77 (19.5)
.41
(10.5)
EACH SIDE:
7 HOLES M4 THD,
DEPTH: .31 (8)
.47
(12)
4 HOLES M4 THD ON 2.95 x .31 (75 x 8)
DEPTH: .31 (8)
4.0
(100)
2.0
(50)
3.94
(100)
25°
1.0
(25)
3.0
(75)
31 HOLES M6 THD,
DEPTH: .31 (8)
DIMENSIONS IN INCHES
(AND MILLIMETERS)
4.53
(115)
2.58
(65.5)
6 HOLES M4 THD ON ø3.62 (92),
EQUIDISTANT AT 60°,
DEPTH: .31 (8)
2.0 (50)
4.0 (100)
2.36
(60)
4.33 (110)
.24 (6)
4.33
(110)
.47 (12)
L
n1 x 2 HOLES CLR
FOR M6 SCREWS
3.94
(100)
3.0
(76.2)
3.0
(76.2)
3.0
(76.2)
n2 x 2 HOLES CLR
FOR 1/4-20 SCREWS
4.0
(101.6)
3.94
(100)
3.94
(100)
MODEL (METRIC)
(M-)ILS100LM
(M-)ILS200LM
n1
2
4
n2
2
4
C
1.08 (27.5)
2.76 (70)
TRAVEL
3.94 (100)
7.87 (200)
L
11.22 (285)
15.16 (385)
(M-)ILS300LM
4
4
3.54 (90)
11.8 (300)
19.09 (485)
3.94
(100)
Newport Corporation, Global Headquarters
1791 Deere Avenue, Irvine, CA 92606, USA
PHONE: 1-800-222-6440 1-949-863-3144
FAX: 1-949-253-1680
www.newport.com
EMAIL: [email protected]
Complete listings for all global office locations are available online at www.newport.com/contact
Belgium
China
France
Japan
Taiwan
PHONE
+32-(0)0800-11 257
+86-10-6267-0065
+33-(0)1-60-91-68-68
+81-3-3794-5511
+886 -(0)2-2508-4977
EMAIL
[email protected]
[email protected]
[email protected]
[email protected]
[email protected]
Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and
Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with
ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.
PHONE
Irvine, CA, USA
+1-800-222-6440
Netherlands
+31-(0)30 6592111
United Kingdom +44-1235-432-710
Germany / Austria / Switzerland
+49-(0)6151-708-0
EMAIL
[email protected]
[email protected]
[email protected]
[email protected]
ILS-LM_DSE (1113)
MODEL SHOWN: ILS300LM
DIMENSIONS IN INCHES (AND MILLIMETERS)