POCl3
BNI Tech.& APMKorea
2009. 4. 1.
I. Chemical Properties
‹ General
9 Systematic name : Phosphoryl chloride
or Phosphorus oxide trichloride
9 Molecular mass : 155
155.3
3
9 CAS number : 10025-87-3
9 Appearance : clear, colorless liquid
Chemical name : Phosphorus oxychlirode
Chemical Formula : POCl3
‹ Properties
9 Density : 1.645 g/cm-3
g/cm 3
9 Solubility in water : Reacted
9 Solubility in other : Reacted in alcohol
9 Melting point : 1
1.25
25°C
C (274
(274.4K)
4K)
9 Boiling point : 105.8°C (379.0K)
9 Vapor Pressure : 28 mmHg (20°C)
104 mmHg
H (50°C)
2
II. Container Drawing
Typical Container Drawing
9 Container
- Capacity : 500, 1000, 1500cc
- Body Material : Quartz
9 Valve
- Body
y Material : Teflon
- DIP : 1/4 inch
- VENT : 3/8 inch
3
III. Valve
BUBBLER VALVE
<Y.H Type>
<J.C Type>
4
IV. Product Specification
Analysis Parameter
Measurement Unit
Specification
Analysis Method
Purity
Assayy
Water
Shelf Life
%
%
ppm
Month
> 99.9999
> 99.9
< 10
12
ICP/MS
Gas Chromatography
g p y
Karl-Ficher Titration
Na
Mg
Al
K
Ca
Cr
Mn
Fe
Ni
Cu
Zn
Pb
Li
Ti
Co
Ga
Sr
Ag
Cd
Sn
Ba
In
As
Bi
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
pp
ppm
ppm
ppm
ppm
ppm
ppm
ppm
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
<
2
2
1
1
1
1
1
5
1
1
2
2
1
1
1
1
1
1
1
1
1
1
1
1
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
/
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
ICP/MS
5
V. Actual Analysis Data by ICP/MS
POCl3 Actual Data(ppb)
Spec(ppb)
1 Analysis
2 Analysis
Mg
g
1.75
1.38
<2000
Al
11.23
7.27
<1000
K
36.23
23.82
<1000
Ca
23.68
20.88
<1000
Cr
0.14
0.45
<1000
Mn
0.09
0.13
<1000
Fe
1.86
4.15
<5000
Co
0.43
0.41
<1000
Ni
0.26
0.42
<1000
Cu
1.66
1.82
<1000
Zn
16 96
16.96
14 32
14.32
<2000
Na
86.43
72.41
<2000
Li
0.08
0.05
<1000
Ti
12.41
11.51
<1000
Ga
0.20
0.20
<1000
Sr
0 25
0.25
0 19
0.19
<1000
Cd
-
-
<1000
Sn
0.25
0.18
<1000
Ba
0.20
0.37
<1000
Pb
0.19
0.20
<2000
Bi
-
-
<1000
1000
Ag
-
-
<1000
As
11.87
11.77
<1000
In
0.02
0.05
<1000
total
206.19
171.98
6