Outline NTS Contamination Control during Product Creation Process (PCP) 1. Introduction 2. NTS‐Group 3. Cleanliness 4. Product Assembly Challenges Marcel Kouters – NTS‐Group, Systems Development 5. Future challenges 6. Questions 1. Introduction 2. NTS‐Group – What we do d Experience • Mechanical Engineering, TU/e Mechanics of Materials. • Graduated at Philips Applied Technologies • Previously TNO Material Scientist – 7 years o Material performance: Metals, ceramics & polymers o Reliability of micro‐electronics, LED, solar cells a.o. • Years of experience at ASML Veldhoven & UCV trainer The NTS‐Group takes full responsibility for the development, production, assembly and maintenance of mechatronic systems, mechanical modules and components for leading OEM’s in the (High) Tech Industry. Systems Development Component Manufacturing dffffff Privately owned Created in 2005 by a merger of Nebato (est. 1954) and Te Strake (est. 1947) Head quarters in Eindhoven (NL) Manufacturing locations in: o The Netherlands o Czech Republic o Singapore o P.R. of China • Recent merge of NTS and Norma / Mecon. • Ca. 1500 employees and > 210 M Euro turnover NTS‐Group head quarters, Eindhoven dffffff 2. NTS‐Group – Snapshot • • • • Mechatronics Assembly dffffff Marcel Kouters • Mechanical Lead Engineer • NTS Systems Development, located in Eindhoven • Expertise on Materials & Cleanliness • Member of VCCN & Cleanliness Compentence Team 2. NTS‐Group Customer base Life Sciences Semicon Analytical Printing Industrial 3. Cleanliness (or Contamination control) • General: Product cleanliness depends on how you specify your contaminants. Contaminants are often unavoidable but controllable in a certain way. • Cleanliness or Contamintion Control a) Particles (flakes, fibres) b) Chemical contamination (stains, fat, grease, oil) c) Gaseous contamination (gaseous, outgassing, molecular) • Why important for our customers? o Functional, lifetime related o Esthetics, appearance • Design‐for‐Cleanliness: Find an optimum between required cleanliness, leadtime, effort and costs. 3. NTS Cleanrooms ‐ Overview 3. How to specify cleanliness • Most customers specify cleanliness for their products or systems. • If not, we specify cleanliness, if needed, for our whole PCP on: 1. Particles 2. Stains 3. Vapor 4. Biological 5. Manufacturing 6. Finish surface treatment 7. Cleaning 8. Handling 9. Assembly 10.Test Amount, size, shape, type, surface/volume Visible, removable (with IPA, acetone or demi‐water), coverage Measurable (TOC/RGA), outgassing rate, volatile components CFU, amount, growth, surface/volume Cutting and cooling fluids, tools, customer approved Pickle & passivate, electroless NiP, electro or mech.polish Ultrasonic bath, air, IPA, disinfect (chlorine, alcohol). Double pack in PE foil, labels, reclosable bags or boxes Assemble in cleanroom (class 5‐6‐7), use mouth cap & gloves UV‐A, bright light, leak test, RGA/TOC, photo’s, withness wafers 3. New ‐ Automatic cleaning line (1) Cleanroom facilities • • • • • • • • NTS Mechatronics ‐ Eindhoven NTS Mechatronics ‐ Brno NTS SD ‐ Wijchen NTS SD ‐ Nijmegen NTS CombiMetaal – Bergeijk NTS Botech ‐ Helmond NTS Precision – Eindhoven NTS Norma ‐ Hengelo 874m2 500m2 155m2 12m2 57m2 76m2 16m2 ? ISO class 5‐8 ISO class 7‐8 ISO class 6‐8 ISO class 7‐8 ISO class 7‐8 ISO class 8 ISO class 8 ISO class 5‐8 New cleanroom NTS Mechatronics, Brno 05/2015 • And more... • Recently installed at NTS Mechatronics (Eindhoven). • Full automatized wet cleaning line by Kemet / FinnSonic. • In total 10 positions: o 3x different types of soap o 3x water rinse o 2x demi rinse o 1x dry oven o 1x extra position • Demi‐bath contamination check. • Extra station for manual cleaning. Automatic cleaning line, NTS Mechatronics, Eindhoven ISO7 cleanroom NTS Mechatronics, Eindhoven 3. New – Automatic Cleaning Line (2) 3. New – Bake‐out vacuum & RGA • Recently installed at NTS Mechatronics (Eindhoven). • Developed and supllied by D&M Vacuum Systems o Bake‐out vacuum oven o Dedictated RGA system RGA interface, NTS Mechatronics Bake‐out & RGA, NTS Mechatronics, Eindhoven 3. Product Assembly Challenges A. Contaminated bolts • • Transport tools for EUV optics A. B. C. D. E. F. G. Contaminated bolts Contaminated thread holes Particles on surfaces Corrosion & stains Rough surfaces Weld flaws Packaging & Labelling • EUV optics transport tool Transport frame in cleanroom • • Problem solving based on 8D approach Problem: o Bolts are contaminated: black contaminants are most like metal particles. Root cause: a) Bolts were (dis)mounted many times: friction generates particles. b) Metal flakes are production process related: insuffient cleaning and inspection. Actions: Remove and clean all bolts in ultrasonic cleaning bath Bolts will be Kolsterized (hard carbon diffusion layer). Clean all thread holes with IPA and thread cutter. Dry & clean with pressurized XCDA to remove all metal particles and flakes. Inspect afterwards with Q‐tip. Make & number photos. Contaminated bolt Contamination check Q‐tip cleaning Cleanroom assembly, NTS Mechatronics B. Contaminated thread holes • • • Problem: o Thread holes are contaminated: corroded, flakes or grease are found. Corroded thread hole Root causes: a) Insufficient cleaning and inspection. b) Crosscontamination by bolts c) Remains are manufacturing process related Action: Check with suppliers. Inspect all threaded holes with Q‐tips Clean all thread holes with IPA and thread cutter. Inspect again afterwards. Vacuum clean or pressurized XCDA to remove particles & chips. C. Particles on surfaces (1) • Problem: o Particles found on surfaces: (1) visual, (2) grazing bright light or (3) UV‐A inspection. • Root causes: a) Insufficient cleaning and inspection. b) Long clean room exposure without shielding. c) Electrostatic components attrack particles. d) Action and work in cleanroom by operators. • Actions: Re‐inspect and clean all area’s. Store clean: cover with foil or pack Cleaning and inspect all surfaces before final packaging. Metal flake & grease found Particles visible under UV‐A Bolt head scratch and contamination UV‐A inspection inside transport tool Manual removal metal flakes C. Particles on surfaces found (2): example D. Corrosion & stains • Problems: o Corrosion stains found on transport frame o Bolts corrroded inside frame • Root causes: a) Manufactured at supplier location on steel frame b) Galvanic corrosion (metals in contact) c) Pickling and pasivation process not sufficient o o • Before cleaning After cleaning Bath or spraying process, drying stains. Acces to all holes and surfaces: drain and venting holes. Corrosion caused by manufacturing on steel frame Corroded returns during assembly Actions: Check with supplier. Polish & clean the corroded surface Replace bolts and clean thread Corroded stainless steel bolt E. Rough surfaces • Problem: o Parts are accessible for contamination o Rough surfaces are not well cleanable • Cause a) Insufficient design‐for‐cleanliness! b) Maching: rough milling pattern or wrong base material selection. c) Awareness: whole production chain needs to know it is a cleanroom product. F. Weld flaws Milled surface after cleaning Rough surface after machining • Problem: o Weld flaw are leaks o Weld flaws capture cleaning fluid • Cause a) Insufficient welding process (or design): heat penetration, wall thickness, welded (bi)materials. b) Stains / corrosion due to outgress cleaning fluid Cleaning fluid outgress from weld • Action Check with supplier. Important: Less mechanical rework on welds Repair welds (very costly €€€) • Action Check with suppliers Rewor, polish & clean the surface Worst case: redesign needed. Reinforced panels are difficult to clean. G. Packaging & Labelling • Problem: o Contamination or damage during transport or storage • Cause a) Wrong packaging or labelling applied b) Packaging damaged due to handling c) Cross contamination 4. Lessons learned Risk for damage during transport? Packing and labeling of small components • Action Clean ultrasonic & repack Contact packaging supplier Reconsider packaging design Weld discoloration Transport bracket General: • Never hurry, (re)consider all your actions. Follow all procedures strictly. • Always check stainless steel or welded frames after pickling and passivating for corrosion and discolorations (stains). No direct contact with steel (tooling or ..). • Cover tools with foil in cleanroom when not in use (order extra foil or bags). • Invite customer at location to qualify/check tool before shipping. Also share knowledge on cleanliness experience. • Try to avoid blind or thread holes if possible in the design. Cap holes when processing (e.g. spray pickling) or manufacturing (post treatments). However: • Bolts & thread will always generate friction and thus particles after many times. • Pickling and passivating stains are always visible for large frames/tools. Toolbox for transport 4. Design for Cleanliness • Design‐rules for clean(able) design are mandatory. • Some rules: o Use clean & cleanable materials: e.g. stainless & aluminum. o Low roughness: e.g. electro‐polishing (EP) or coatings (NiP) o Smooth or rounded edges: no remains from cleaning wipes. o No blind holes, entrapped volumes, large contact area’s. o Cleanable assembly or design to clean mono‐part before assembly o Minimize or avoid lubricants (e.g. grease or oil) or fluids (e.g. cutting or cooling). o Think about how to test / measure / verify cleanliness. • Consider how to keep your system clean during operation or maintenance. 5. Future challenges AddLab: shared facility for 3D metal printing • Cleaning of 3D metal printed products o Metal powder particles melt to surface o Conventional methods not sufficient o Roughness inherent to printing process 5. Eindhoven Brainport talentbox • Recently white‐paper published on Cleanliness: an inside perspective • Strong focus on design‐for‐cleanliness. • Search for talented young technicians & engineers! 6. Questions A.1 NTS‐Group ‐ Proposition Stages & Handlers Mechatronic Systems Optical Systems (Optel) Mechanical Modules Handling & Transport Tooling One Off Equipment NL USA NL USA NL USA NL USA NL NL TECHNOLOGY FOCUS Time‐to‐market Transparant cost Clear timing Clear deliverables Flexible PDM/CAD Assembly Development Prototyping (Wijchen) Manufacturing Markets: • Semicon • Digital Printing • Life Sciences • Analytical • Industrial Development Appendices NTS Mechatronics Eindhoven NTS Mechatronics Brno NTS Mechatronics Singapore NTS Mechatronics Shanghai GLOBAL HLA FOOTPRINT Minimize volume shipping Precision Mechanics Granite High Precision Parts Sheet Metal frames & covers Finishing NTS Precision NTS Botech NTS Prometal (CZ) NTS Botech NTS Prometal (NL) NTS Prometal (CZ) NTS Comp. Singapore NTS Comp. Suzhou NTS Finish NTS Prometal(CZ) NTS Comp. Singapore NTS Comp. Suzhou IN‐HOUSE MANUFACTURING OF CRITICAL COMPONENTS Aligned with global footprint To support our customers with high‐level engineering, local assembly & in house manufacturing of components of (opto)‐mechatronic systems and mechanical modules A.2 NTS‐Group World wide D&E & Proto Shop D&E & Proto Shop Assembly Assembly Machining Sheetmet. Coating Sheetmet. Coating Assembly Machining Sheetmet. Coating Granite Assembly Sheetmet. Coating Machining
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