High-Performance
Long-Travel
Linear Motor Stages
SP
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IMS-LM
F I C ATI O
SERIES
RoHS
Compliant
The IMS-LM series linear motor stages are designed for selfsupporting applications with travel ranges from 300 mm to
1200 mm. The stages feature a robust design with high
performance but with low cost, making them cost-effective
solutions for precision industrial applications such as
semiconductor wafer inspection, micro-electronics test and
assembly, pick and place, DNA sequencing, or laser machining.
The IMS-LM-SA version with, 4-pt mounting, is ideal for delay
lines and other applications with non-flat mounting surfaces.
The IMS-LM series utilizes an FEM optimized extruded
aluminum body that is extremely stiff and minimizes the bending
effect caused by different thermal expansion coefficients of the
aluminum body and the steel rails.
• Stiff body design allows for rigid XY assemblies (up to 600 mm for Y)
• Single axis or gantry configuration up to 1200 mm travel
• Non-contact direct-drive system supplies high dynamic performance
and high reliability in a small footprint
• High-efficiency ironcore linear motor minimizes heat generation for
rapid and repeatable point-to-point positioning
• Recirculating bearings with caged balls assure ultra-quiet motion and
longer service intervals
• High resolution linear encoder feedback for accurate positioning and
sub-µm repeatability
• Turnkey solutions including control and drive electronics
Unlike-screw driven stages, the IMS-LM employs a centerdriven linear motor. This linear motor is absolutely noise-free and
has the advantage of higher speed, acceleration and system
responsiveness without wearing of motor brushes or drive
screws. Due to the fully integrated linear motor, the IMS-LM is
more than 100 mm shorter in length than a comparable screw
driven stage. Thus, the IMS-LM is the optimum solution for
space constrained applications that require high-throughput,
high reliability, and ultra-quiet operation.
The IMS-LM uses a high efficiency 3-phase synchronous
ironcore linear motor. While ironcore linear motors are often
criticized for their cogging and high attractive forces, their
efficiency is almost twice the efficiency of ironless linear motors.
This results in higher acceleration capabilities and significant
less heat dissipation which often limits performance of rapid
point-to-point positioning.
IMS-LM SERIES
200
Setpoint
position
Recirculating ball bearing slides with caged balls provide excellent payload
capacity and long life. The ball separators in the recirculating elements
ensure superior smooth movement, lower noise, and longer service life
compared to uncaged ball bearing slides.
Interferometer
position
Position (nm)
160
120
80
40
0
-40
0
5
10
15
20
25
Time (s)
IMS-LM stages are capable of performing very small
incremental motion with high accuracy and repeatability.
Precision position feedback is supplied by a highly repeatable linear scale
mounted inside the stage. The encoder signals are interpolated by Newport’s
XPS motion controller with 20 nm MIM for outstanding Minimum Incremental
Motion, repeatability, and stability. Absolute home position and limit signals
are incorporated in the same to improve repeatability and reliability, while
simplifying the design with less electronics and mechanical parts.
2.0
D E S I G N D E TA I L S
1.5
Error (µm)
1.0
0.5
Base Material
0.0
Extruded Aluminum
-0.5
Bearings
Recirculating bearings with caged balls
-1.0
Drive System
3-phase synchronous ironcore linear motor (no Hall effect sensors)
-1.5
Motor Initialization
-2.0
-80
-60
-40
-20
0
20
40
60
80
Position (mm)
Accuracy of an IMS300LM stage after compensating for linear
errors. The data was taken at a rate of 10 kHz while the stage
was moving at a speed of 50 mm/s. Both, the encoder and the
interferometer position were acquired by an XPS motion
controller with a latency of less than 50 ns between the
different signals.
Done by the XPS controller using a special routine (no Hall effect sensor) that avoids large motion
during initialization
Motor Commutation
Done by the XPS controller on encoder signals
Feedback
Linear steel scale, 20 µm signal period, 1 Vpp, 32768-fold signal subdivision by XPS controller,
alternative RS422 TTL output upon request
Limit Switches
Optical
Home Switch
Optical, on encoder’s fiducial track, located at center of travel
Cable
5 m long cables included
MTBF
20,000 hours
Weight
IMS300LM: 37.5 lb (17 kg); IMS400LM: 41.9 lb (19 kg); IMS500LM: 46.3 lb (21 kg);
IMS600LM: 50.7 lb (23 kg); IMS800LM (1): 52.9 lb (24 kg); IMS1000LM (1): 61.7 lb (28 kg);
501.0
IMS300LM, 500 mm/s, 1 kHz data rate
500.8
IMS1200LM (1): 70.5 lb (32 kg)
500.6
1)
Speed (mm/s)
500.4
Same weight for the -SA versions.
500.2
500.0
499.8
S P E C I F I C AT I O N S
499.6
499.4
499.2
499.0
-50
-40
-30
-20
-10
0
10
20
30
40
50
Travel Range
Position (mm)
IMS-LM
IMS-LM-SA
300, 400, 500, 600,
800, 1000, 1200 mm
800, 1000, 1200 mm
IMS-LM stages provide outstanding speed stability for
continuous scanning and laser machining applications.
5 nm (1)
Commandable Resolution
Minimum Incremental Motion
Bidirectional Repeatability
On-Axis Accuracy
6.0
5 kg load
24 kg load
IMS300LM, 300 mm move, 500 mm/s, 2 m/s2
4.0
20 nm
0.5 or ±0.25 µm (2)
1 or ±0.5 µm
9 or ±4.5 µm (2)
30 or ±15 µm (3)
Maximum Speed
500 mm/s
20 m/s2
Following error (µm)
Max. Acceleration (No Load)
2.0
Max. Force (Continuous)
70 N
0.0
Max. Force (Peak, 4 s)
140 N
Normal Center Load Capacity
-2.0
Pitch
-4.0
600 N
100 N
250 or ±125 µrad (2)
IMS800LM-SA: 400 or ±200 µrad
IMS1000LM-SA: 450 or ±225 µrad
-6.0
0.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
1.1
Time (s)
The high stiffness of the IMS-LM stages results in very short
settling times that improve the performance and throughput of
many stepping, scanning, and continuous machining processes.
IMS1200LM-SA: 500 or ±250 µrad
Yaw
1)
XPS internal resolution is below 1 nm.
For 600 mm travel.
3) For 1200 mm travel.
2)
200 or ±100 µrad (2)
300 or ±150 µrad
H I G H - P E R F O R M A N C E
L O N G - T R A V E L
L I N E A R
M O T O R
S T A G E S
LOAD CHARACTERISTICS AND STIFFNESS
Z
QH
D
IMS-LM
Cz, Normal center load capacity on bearings
kax, Angular stiffness (Roll)
IMS-LM-SA
600 N
100 N
1 µrad/Nm
2 µrad/Nm
kay, Angular stiffness (Pitch)
0.2 µrad/Nm
2 µrad/Nm
kaz, Angular stiffness (Yaw)
1 µrad/Nm
1 µrad/Nm
Q, Off-center load
Y
Cz
X
Q ≤ Cz/(1 + D/90)
D, Cantilever distance in mm
DIMENSIONS
L
MODEL SHOWN: IMS300LM
7.09
(180)
DIMENSIONS IN INCHES (AND MILLIMETERS)
SIDE VIEW
(M-)IMS300LM TO (M-)IMS600LM
7.05
(179)
3.54
(90)
1.10
(28)
.83
(21)
.83
(21)
5.91 (150)
5.91 (150)
5.91 (150)
SIDE VIEW
(M-)IMS800LM(-SA) TO (M-)IMS1200LM(-SA)
n1 x 2 HOLES CLR
FOR M6 SCREW
5.91
(150)
6.0
(152.4)
5.0 (127)
5.0 (127)
4.36
(111)
7.09
(180)
IMS800LM-SA stage.
5.0 (127)
MODEL (METRIC)
(M-)IMS300LM
(M-)IMS400LM
(M-)IMS500LM
(M-)IMS600LM
(M-)IMS800LM
(M-)IMS1000LM
(M-)IMS1200LM
(M-)IMS800LM-SA
(M-)IMS1000LM-SA
(M-)IMS1200LM-SA
n1
n2
4
4
4
4
4
6
6
6
6
–
7
–
8
–
4 HOLES ON 26 x 6 (600 x 150)
4 HOLES ON 28 x 6 (750 x 150)
4 HOLES ON 34 x 6 (900 x 150)
n2 x 2 HOLES CLR
FOR 1/4-20 SCREW
TRAVEL
11.81 (300)
15.75 (400)
19.69 (500)
23.62 (600)
31.49 (800)
39.36 (1000)
47.23 (1200)
31.49 (800)
39.36 (1000)
47.23 (1200)
L
21.85 (555)
25.79 (655)
29.72 (755)
33.66 (855)
44.48 (1130)
52.35 (1330)
60.22 (1530)
44.48 (1130)
52.35 (1330)
60.22 (1530)
IMS-LM SERIES
HIGH-PERFORMANCE LONG-TRAVEL LINEAR MOTOR STAGES
Top Plate Interface
5 HOLES M5 THD ON ø6.85 (174),
EQUIDISTANT AT 60°,
USABLE DEPTH: .35 (9)
5 HOLES M5 THD/ø5.39 (137),
EQUIDISTANT AT 60°,
USABLE DEPTH: .35 (9)
5 HOLES M4 THD/ø3.62 (92),
EQUIDISTANT AT 60°,
USABLE DEPTH: .31 (8)
SQR 7.05 (179)
Dimension [in. (mm)]
(M-IMS-LM)
IMS-LM
(M-IMS-LM-SA)
IMS-LM-SA
1/4-20
(M6)
2.00
(50)
3.00
(75)
4.00
(100)
6.00
(150)
1.00
(25)
2.00
(50)
4.00
(100)
.51 (13)
B
2.48
(63)
C
3.62
(92)
D
E
A
B
C
D
E
F
G
H
15°
22.5°
25°
4 HOLES CLR FOR
M6 SCREW BACK SIDE
F
4 HOLES M4 THD
ON 3.94 x 2.95 (100 x 75),
USABLE DEPTH: .31 (8)
TOP PLATE
G
DIMENSIONS IN INCHES (AND MILLIMETERS)
2.48
(63)
H
37 HOLES THREAD A,
USABLE DEPTH: .39 (10)
6.14
(156)
RECOMMENDED CONTROLLERS/DRIVERS
XPS
Universal High-Performance Motion Controller/Drive
O R D E R I N G I N F O R M AT I O N
Available in 2, 4, 6 or 8-axis versions
XPS-DRV02
PWM Drive Module for Brushless Motors
Note: For higher speeds, contact Newport.
Model
Description
(M-)IMS300LM
IMS-LM stage, 300 mm travel
(M-)IMS400LM
IMS-LM stage, 400 mm travel
(M-)IMS500LM
IMS-LM stage, 500 mm travel
(M-)IMS600LM
IMS-LM stage, 600 mm travel
(M-)IMS800LM
IMS-LM stage, 800 mm travel
(M-)IMS1000LM
IMS-LM stage, 1000 mm travel
(M-)IMS1200LM
IMS-LM stage, 1200 mm travel
(M-)IMS800LM-SA
IMS-LM-SA stage, 800 mm travel
(M-)IMS1000LM-SA
IMS-LM-SA stage, 1000 mm travel
(M-)IMS1200LM-SA
IMS-LM-SA stage, 1200 mm travel
IMSLMC
Cable chain for routing cables to the stationary base, call for XY
IMSLMC2
Cable chain for routing cables to the stationary base, for stages with
assemblies of stages with 300, 400, 500 or 600 mm travels
800, 1000 or 1200 mm travels
Note: (M-) for metric versions.
Newport Corporation, Global Headquarters
1791 Deere Avenue, Irvine, CA 92606, USA
PHONE: 1-800-222-6440 1-949-863-3144
FAX: 1-949-253-1680
www.newport.com
EMAIL: [email protected]
Complete listings for all global office locations are available online at www.newport.com/contact
Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-la-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British Standards Institution. Santa Clara, California is DNV certified.
IMS-LM_DSE (02/15)
IMSLMC cable chain for routing cables to the stationary base.
For cable management of XY assemblies, please call Newport.