The Opportunities and Challenges of
Waste-Recycling for Semiconductor Plants
Arthur Chuang
Senior Director, 300mm Fabs Division, TSMC
Overview of Industrial Waste
Management in Science Parks
2
Waste Management Flow and Treatment
Overview
Waste Prevention
and Minimization
Waste
Collection
Waste Diversion
through Recycle
and Reuse
Composting
of Waste Fraction
Incineration and Other
Thermal Processes
Sanitary
Landfilling
Anaerobic Digestion
of Waste Fractions
3
Residual
Landfill
Domestic Waste Overview of Taiwan
• In 2014, domestic waste was 26,250 kiloton in Taiwan, in which
municipal waste was 28% and enterprise waste was 72%.
• The waste-recycling rate of municipal waste was 56%, enterprise
waste was 81%, therefore the final disposed wastes are both
around 3,000 kiloton.
Municipal waste
K ton/yr
10,000
9,000
8,000
7,000
6,000
5,000
4,000
3,000
2,000
1,000
-
48.8%
52.2%
54.4%
55.0%
55.6%
25,000
60.0%
50.0%
3,611
3,379
3,300
15,000
3,273
3,944
2,010
2,011
recycle
4,034
4,097
2,012
2,013
non-recycle
2,014
4,025
82.4%
80.8%
79.9%
81.0%
3,510
3,290
3,440
3,760
3,590
14,580
15,440
14,510
14,910
15,290
2,010
2,011
2,012
2,013
2,014
30.0%
10,000
20.0%
3,885
80.6%
20,000
40.0%
4,073
Enterprise waste
K ton/yr
5,000
10.0%
0.0%
recycle
Data source: EPA 2014 Waste-Recycling Annual Report
4
non-recycle
100.0%
90.0%
80.0%
70.0%
60.0%
50.0%
40.0%
30.0%
20.0%
10.0%
0.0%
recycling rate
Industrial Waste Overview of Taiwan
• According to the EPA, total enterprise waste weighed 18,880
kilotons in 2014, in which 88% was industrial waste.
• The highest industrial waste was slag from steel industry (28%),
and the waste from electronics was 670 kilotons (3.5%).
8,000
Declaration
Cumulative Percentage
7,000
6,000
5,312
5,000
46%
4,000
3,000
2,000
1,000
52%
56%
62%
64%
66%
67%
68%
59%
672
557
376
297
260
238
28%
3,327
1,150
712
-
Data source: EPA 2014 Waste-Recycling Annual Report
5
100%
90%
80%
70%
60%
50%
40%
30%
20%
10%
0%
Electronic Waste Overview of Science Parks
• In 2014, Science Parks generated 630 kilotons of industrial
waste, which was 3.3% of total enterprise waste. Obviously 88%
of them was originated from semiconductor and optoelectronics
manufacturing.
• The waste-recycling rate of optoelectronics was about 80%, and
semiconductor manufacturing was about 92% in recent years.
Waste-Recycling Rate
100.0%
95.0%
92%
90%
91.7%
90.0%
85.1%
85.0%
80.0%
81.0%
84%
84%
82.0%
79.9%
75.9%
75.0%
Semiconductor
Optoelectronic
70.0%
2010
2011
2012
6
2013
2014
Typical Wastes from a Semiconductor Plant
• In Taiwan, semiconductor manufacturing generated 310 kilotons
wastes in 2014.
• The major wastes coming from semiconductor manufacturing
are acid (43%), solvent (25%) and sludge (18%).
Electronic Industry
K ton/yr
%
K ton/yr
800.0
600.0
34.9
500.0
300.0
32.8
31.8
104.3
32.0
103.1
139.6
137.4
130.9
116.6
200.9
215.8
80
142.6
141.7
239.7
78%
60
309.8
60%
43%
50%
40%
51
30
30
30%
24
20%
9
7
-
2010
2011
Semiconductor
2012
Panel
2013
Optoelectronic
Packaging
7
4
10%
0%
2014
Data source: EPA, Industrial Waste Report and Management System
90%
70%
59%
20
-
100%
80%
69%
100
40
192.4
132
120
175.4
144.6
200.0
100.0
140
44.1
%
92% 93%
86% 89%
160
700.0
400.0
Semiconductor Manufacture
Qty
Cumulative proportion
Typical Waste from a Semiconductor Plant
Category
Volume
Recycled Products
Sell/Pay Status
H2SO4, H3PO4, HF
51%
Industrial H2SO4
6% Sell
94% Pay
Thinner, IPA, NMP
14%
Industrial Solvent
100% Sell
(NH4)2SO4, TMAH
12%
(NH4)2SO4, NH4OH,
/TMAH
21% Sell
79% Pay
CaF2 Sludge
8%
Cement
Pay
SiO2 Sludge
5%
Cement
Pay
CuSO4
4%
Cu/CuSO4
Sell/Pay
Waste Plastic Mixtures
2%
Plastic Barrel
Sell
Active Carbon, Non-Toxic Waste
Chemical, Waste Wiper…etc.
4%
Incineration or Landfill
Pay
100%
Recycling Rate
95%
~20% Sell
~80% Pay
TOTAL
8
Waste Treatment Industry of Taiwan
Strength
Weakness
 Supported by governmental policy with
complete and compulsory regulations.
 It is difficult to trace the reuse status for
recycled products.
 Government monitor treatment facility and
loading ratio, therefore, to prevent insufficient
treatment capacity.
 The authorities are dispersed in 10 different
administrations such as MOEA and so on.
 The penalty of Waste Clearance Regulation is
relatively loose than other environmental
regulations.
 Wastes sources are stable and sufficient.
Opportunities
Threats
 Society distrust waste-treatment industry. The
recycled products has not yet been accepted
by consumers, the market is still restricted.
 The waste treatment process involves several
companies in loop and increases possibility of
abuses.
 It is difficult to build a new treatment plant.
Once the plants are full loaded, wastes can no
longer be treated.
 Due to the raise of environmental awareness in
Taiwan. The enterprises are more willing to
invest and develop technologies for waste
treatment and recycling.
 To improve waste value through a refined
classification and pretreatment at the sources.
 To improve industry’s premium and credibility
of environmental protection.
9
Status of the Polluted Sites under EPA’s
Observation
• According to the EPA, there 19 illegal dumping sites are polluted
and controlled for recovery. The major illegal wastes include
sludge, slags and waste liquid.
• Based on pollution area, 76% of the affected area is polluted by
heavy metal (mercury, nickel, cadmium, chromium, copper, zinc,
lead) and the other 24% is organic solvent (benzene, phenol).
hectare (ha)
15.0
5.4
10.0
0.0
5.0
8.8
8.2
Soil
groundwater
0.0
metal
solvent
Data source: EPA, Environment Resource Database
10
Establish Waste-Recycling Value
Chain in Semiconductor Plants
11
Waste Management Hierarchy
VALUE
Waste Economics
• Recycling is processing used materials into
new, useful products. This is done to reduce
the consumption of raw materials that would
have been used.
• Recycling also uses less energy and great
method of controlling air, water and soil
pollution.
Buy Recycled
12
Waste Management Process
• Start from… identifying and quantifying your waste. Organize a
waste management team to drive things forward.
• Generate an waste reducing action plan. Get commitment from
senior management for the action plan.
• Identify the possible disposal options if the waste is
unrecyclable. Select your waste carriers carefully and make sure
that your Duty of Care responsibilities are met.
• Monitor and review your achievements. Communicate your
success to interested stakeholders outside your organization.
13
Recycling – Transform the Value of Waste from
Negative to Positive
• After a proper converting process, to raise the quality and price
value of recycled waste and to compete with new product.
• In Taiwan, Nearly 60% of industries depend on recycling industry to
provide partial raw materials to balance cost with imported
materials. The annual production of recycling industry is growing
doubly in the last decade and reached NT$ 67.8 billion in 2015.
billion
• The steel slags, furnace dust, solvent and metal contribute the
most to the production amount.
70
65
60
55
50
45
40
35
30
65.8
65.8
65.9
67
67.8
54.4
48.2
48.7
42
38.5
2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
Data source: IDB, Industrial Waste Clearance, Treatment and Recycling information net
14
Innovation on Waste Recovery
• Since the waste generated by each company is unique, therefore
it is necessary to have professional teams for recycling.
Brainstorm to generate ideas and creative methods of waste
recovering. Only a long-term commitment can increase profits
through reducing waste.
• Generally speaking, the first priority of waste-recycling tasks is
to analyze the ingredients of the wastes, to investigate a proper
classification method for simplifying the complexity of the waste
and to manage the waste according to the recycling structure.
• One of the best strategies is to treat the waste with waste, to
transform it into a useful or valuable material.
15
Waste Sulfuric Acid Recycling –
Electronic Grade
Information source: AUECC (a Linde/LienHua Company)
16
Waste Sulfuric Acid and Ammonia Nitrogen
Recycling – Industrial Grade
Information source: TSMC
17
On-Site Chemical Recycling Facility – TMAH
Information source: TSMC
18
On-Site Electroplating Facility – Copper Sulfate
Information source: TSMC
19
Artificial Fluorite Sintering Facility – Calcium
Fluoride
Information source: CHC Resources (a China Steel Company)
20
Sustainable Waste-Recycling Index –
Sales Rate
Volume
Recycled Product
(Present)
Sell/Pay
Status
Recycled Product
(Future)
Sell/Pay
(Future)
H2SO4, H3PO4, HF
51%
Industrial H2SO4
6% Sell
94% Pay
EL grade H2SO4,
Na3PO4/CaF2
100% Sell
Thinner, IPA, NMP
14%
Industrial Solvent
100% Sell
Industrial Solvent
100% Sell
(NH4)2SO4, TMAH
12%
(NH4)2SO4/TMAH
21% Sell
79% Pay
(NH4)2SO4, NH4OH,
/TMAH
87.5% Sell
12.5% Pay
CaF2 Sludge
8%
Cement
Pay
Fluorite (85% CaF2)
100% Sell
SiO2 Sludge
5%
Cement
Pay
Cement
Pay
CuSO4
4%
Cu
CuSO4
Sell/Pay
Copper
Sell
Waste Plastic Mixtures
2%
Plastic Barrel
Sell
Plastic Pellets
Sell
Active Carbon, Non-Toxic
Waste Chemical, Waste
Wiper…etc.
4%
Incineration or
Landfill
Pay
Incineration or
Landfill
Pay
100%
Recycling Rate
95%
~20% Sell
~80% Pay
Category
TOTAL
21
85% Sell
15% Pay
Opportunities and Challenges
to Connect the Future
22
Be a Reputable, Licensed, Specialist Company
• A professional, responsible and sustainable waste treatment
industry is essential to success of waste treatment.
• In terms of reliability and credibility, the state-owned treatment
organizations are currently much better than private ones, the
differences of their performance are probably due to their
different business and financial models.
• The waste treatment industry should establish a transparent
management mechanism and information platform, such as
– an open and public logistic information and trading process.
– audit or verification guidelines ensure the sustainable industry.
23
Governance on Waste Management
• If the government is not capable to conduct the waste treatment
enterprises, they should consider to transform the industry into
state-owned enterprises (monopolistic sale) in order to protect
the environment.
• Profits Guarantee: Set a minimum treatment price to avoid price
competition. It can assure that the treatment plants gain fair
profits, therefore they should be responsible of the legality.
• Responsibility Guarantee: Evaluate the performance of each
treatment plant periodically . There should be a disqualification
mechanism to assure the quality of treatment plants.
• Administrative Assistance: Amend the regulations to authorize
enterprises selling their recycled wastes (B2B), so that the
enterprises may dedicate to waste-recycling business.
24
Optimize Waste Management Program
• The first strategy of waste management is reduction, as well as
prevention. The second is reuse, the last is recycling. Therefore
reducing the usage from the source is the core value of the waste
management.
• Bring waste treatment program to senior management level, which
means to optimize the program through top-down management, is
the opportunity to eliminate waste from the source i.e. reduction or
prevention stage.
• Recycling and reuse can be as effective as possible only if the
traditional logistic management is transformed. Facility should be
requested to take more responsibility of waste reduction program
and to dedicate into the new technology development .
• Encourage the suppliers to commit to waste-recycling, help the
development of waste-recycling supply chain.
25
Recycle Your Business Waste by Yourself
• The more refined categories of wastes, the easier of recycling
process and higher of recycling rate. One of the most important
strategies of waste recycling is to recycle one’s own waste, so
that the complexity and the process of waste recycling can be
simplified.
• Designing an on-site recycling can reduce the risk of outbound
transportation. When the outbound transportation is eliminated,
not only the transportation can be relieved, but also the risk of
illegal dumping waste can be avoided.
26
Summary
27
The Opportunities and Challenges of WasteRecycling for Semiconductor Plants
• Treat the waste locally and avoid long distance transportation. It
is suggested that the government include the treatment plants
into industrial park or regional management system.
• Integrate the waste treatment plants to achieve better economic
and technical scopes, so that the profits can be ensured and
legal operation can be achieved.
• The waste treatment industry should assure profitability and
prohibit the price competition. The logistic operation should be
transparent, be watched by the society.
• High-tech industry can help to establish structured industrial
chains of waste recycling and final disposal. It is suggested that
the government assist and use this industrial chain to improve
the waste recycling performance of general industrial area.
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The Opportunities and Challenges of WasteRecycling for Semiconductor Plants
• Same as green manufacturing and quality improvement
program, each corporation should monitor the waste reduction
outcome of their supply chains and encourage them to develop
the waste recycling techniques and business innovation.
• Facility organizations should invest their resources, take the
responsibility to solve the waste issues and to reduce operating
cost through waste-recycling.
• Waste recycled as raw-materials (cradle to cradle) is happening
now, it deserves effort for the enterprises to evaluate and to
consider their commitments to the waste recycling.
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Thank You
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