Z Stage Sensor Kit Tool: Archer 5, 10, AIM, 10XT, XT PLUS, AIM

K-T SERVICES
Z Stage Sensor Kit
Tool: Archer 5, 10, AIM, 10XT, XT PLUS, AIM, eAIMPLUS, 100, 200
THIS UPGRADE IMPROVES THE TIME TO RECOVER OF THIS TOOL
BENEFITS
ƒƒAlthough properly set soft and hard limits will
prevent most occurrences of the objective lens
reaching the hard stop, the very short working
distance between the two creates an occasional
possibility for this to happen.
ƒƒThis upgrade minimizes optics contacting the hard
stop and thus
ƒƒReduces system down time
--Loss
of customer productivity
--Recovery
duration could be as long as 3-4 weeks
ƒƒReduces repair cost
--Expensive
Z Ma x
--On-site
parts, extensive labor
TSE or Optical Engineer required in most cases
Objective at focus position
Soft Limit
Z Low Limit
Z-Stage Sensor shuts
Hard limit
power to the Z-stage motor
above the Hard Limit
W afer
Chuck
Objective
working
distance
K-T SERVICES
Z Stage Sensor Kit
Tool: Archer 5, 10, AIM, 10XT, XT PLUS, AIM, eAIMPLUS, 100, 200
THIS UPGRADE IMPROVES THE TIME TO RECOVER OF THIS TOOL
Parts for upgrade
Part Number
Description
Tool Model
0262234-000
Z Safety Sensor KIT – Schneeberger Stage
Archer 10, 5, AIM, 10XT, XT PLUS (all OMD)
0262233-000
Z Safety Sensor KIT – ETEL Stage
Archer 100, 200, eAIMPLUS (all OMD)
This upgrade is estimated to take 1 day to complete
THIS UPGRADE INCLUDES
ƒƒHard Stop Upper Corner Bracket
ƒƒZ Hard Stop Adjustment Screw
ƒƒZ Hard Stop Limit Sensor
ƒƒZ Hard Stop Corner Bracket
ƒƒCabling
The upgrade kit (part number) depends on which z-stage is in your system. The z-stage type can be confirmed by
a KLA-Tencor service representative.
Pre-existing issues found during the installation will not be covered in the enhancement kit price.
QUESTIONS? Please contact a local service center or e-mail [email protected]