K-T SERVICES Z Stage Sensor Kit Tool: Archer 5, 10, AIM, 10XT, XT PLUS, AIM, eAIMPLUS, 100, 200 THIS UPGRADE IMPROVES THE TIME TO RECOVER OF THIS TOOL BENEFITS Although properly set soft and hard limits will prevent most occurrences of the objective lens reaching the hard stop, the very short working distance between the two creates an occasional possibility for this to happen. This upgrade minimizes optics contacting the hard stop and thus Reduces system down time --Loss of customer productivity --Recovery duration could be as long as 3-4 weeks Reduces repair cost --Expensive Z Ma x --On-site parts, extensive labor TSE or Optical Engineer required in most cases Objective at focus position Soft Limit Z Low Limit Z-Stage Sensor shuts Hard limit power to the Z-stage motor above the Hard Limit W afer Chuck Objective working distance K-T SERVICES Z Stage Sensor Kit Tool: Archer 5, 10, AIM, 10XT, XT PLUS, AIM, eAIMPLUS, 100, 200 THIS UPGRADE IMPROVES THE TIME TO RECOVER OF THIS TOOL Parts for upgrade Part Number Description Tool Model 0262234-000 Z Safety Sensor KIT – Schneeberger Stage Archer 10, 5, AIM, 10XT, XT PLUS (all OMD) 0262233-000 Z Safety Sensor KIT – ETEL Stage Archer 100, 200, eAIMPLUS (all OMD) This upgrade is estimated to take 1 day to complete THIS UPGRADE INCLUDES Hard Stop Upper Corner Bracket Z Hard Stop Adjustment Screw Z Hard Stop Limit Sensor Z Hard Stop Corner Bracket Cabling The upgrade kit (part number) depends on which z-stage is in your system. The z-stage type can be confirmed by a KLA-Tencor service representative. Pre-existing issues found during the installation will not be covered in the enhancement kit price. QUESTIONS? Please contact a local service center or e-mail [email protected]
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