Piezo LEGS Linear 6N
®
New Generation
•
•
•
•
Direct drive – backlash free
High resolution optical encoder
No power draw in hold position
Quick response and high
speed dynamics
The LL06 linear motor is intended for a large range of OEM
applications with focus on precise positioning. The direct
drive principle of Piezo LEGS ensures motion without
any mechanical play or backlash. Sub‑micrometer
movement is made easy with this very compact and
strong motor. It replaces conventional stepper motor
assemblies when there is need for better resolution and
smoother linear movement.
The Piezo LEGS technology is characterized by its
outstanding precision and fast response and settling
time. Small footprint, low weight, and modest power
consumption are other benefits. In combination with the
nanometer capabilities the technology is quite unique.
The motor is ideally suited for move and hold applications
since it is stiff by design and does not consume any
power when holding a position. The drive technology is
direct, meaning no gears or lead screws are needed to
create linear motion. The motor moves by microstepping,
dividing a full waveform-step into nanometer size
increments. Speed ranges from nanometers per second
to millimeters per second, and can be seamlessly
controlled in the whole dynamic range with no need to
alter the driving mode.
The LL06 linear motor is available with a high resolution
position sensor, and with drive rods of different lengths
(30, 40, 50, 60 and 100.8 mm). The motor is easily
integrated and will most likely simplify and reduce the
size of your system.
Controlling the motor
We offer a range of drivers and controllers. The PMD301
micro-step controller/driver can be used either as a
driver connected to an external motion controller, or as
a closed loop controller to handle precise positioning
with commands over serial RS485 or USB interface.
Multiple units can be chained and controlled over the
same serial line. The microstepping feature divides the
wfm-step into thousands of small increments which
results in nanometer resolution.
The PMD401 board level controller/driver also
communicates over RS485 serial interface, and is the
most compact solution. For many OEM applications with
demand for close integration, this board is the right
selection for one or multiple axis of motion.
The most advanced alternative is the DMC-30019 which
is a fully featured PID controller with Galil architecture.
It can handle speed control and trajectory following, and
it has script programming capability with multitasking
for concurrent execution of four programs.
Some customers prefer to design their own driver for
ease of integration. We provide information to assist in
the design.
PMD301
PMD401
DMC-30019
Summary
Motor LL06
Basic
Most compact design
Guided
With drive rod guides
Guided w. sensor Including high resolution sensor
Controller
PMD301-01
1-axis controller/driver
PMD401-01B
1-axis board level controller
DMC-30019-01
1-axis Galil controller
Piezo LEGS Linear 6N
®
New Generation
Operating Principle
1 When all four legs are
electrically activated they
are elongated and bending.
As we shall see below,
alternate legs move as
pairs. Arrows show the
direction of motion of the
tip of each leg.
The Piezo LEGS walking principle is of the non-resonant
type, i.e. the position of the drive legs is known at any
given moment. This assures very good control of the
motion over the whole speed range.
The performance of a Piezo LEGS motor is different
from that of a DC or stepper motor in several aspects.
A Piezo LEGS motor is friction based, meaning the
motion is transferred through contact friction between
the drive leg and the drive rod. You cannot rely on each
step being equal to the next. This is especially true if
the motor is operated under varying loads, as shown
in the diagram below. For each waveform cycle the
Piezo LEGS motor will take one full step, referred to
as one wfm‑step (~7.5 µm at no load with waveform
Rhomb). In the schematic illustrations to the right, you
can see one step being completed. The velocity of the
drive rod is wfm-step length multiplied with waveform
frequency (7.5 µm x 2 kHz = 15 mm/s).
2 The first pair of legs
maintains contact with the
rod and moves towards
the right. The second pair
retracts and their tips
begin to move left.
3 The second pair of legs
has now extended and
repositioned in contact
with the rod. Their tips
begin moving right. The
first pair retracts and their
tips begin to move left.
Micro-stepping is achieved by dividing the wfm-step into
discrete points. The resolution will be a combination of
the number of points in the waveform, and the load.
Example: at 3 N load the typical wfm‑step length with
waveform Delta is ~4 µm, and with 8192 discrete
points in the waveform the micro-step resolution will
be ~0.5 nm.
4 The second pair of legs
has moved right. The first
pair begins to elongate and
move up towards the rod.
8
WFM-STEP LENGTH [µm]
7
Rhomb
6
5
Delta
4
3
2
1
0
0
1
2
3
4
5
6
EXTERNAL FORCE [N]
Figure 1 Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step length
is the average distance the drive rod moves when the legs take one wfm-step (i.e. for one waveform cycle).
Note: Standard deviation σ of 0.5 µm should be taken into account. Typical values are given for 20ºC.
Piezo LEGS Linear 6N
®
New Generation
Without guides and sensor
With guides and sensor
23,4
Main Dimensions
17
6,85
2x
1,67
5
7
2,1 THRU ALL
3 x M1.6
Pin 1 Phase 1
Pin 2 Phase 2
Pin 3 Phase 3
Pin 4 Phase 4
Pin 5 GND
19,6
15,33
8,23
4
Motor connector
8,6
1,5
10,35
DETAIL
SCALE 4
L+3
L
3,6
L = Drive rod length
Stroke = L−26.9Sheet
mm metal extender
3
6,5
1,65
Not to Scale
Enlarged for Clarity
8
20,15
23,4
L-3,5
17
L
Option 1: Fasten motor using 2x M2 screws (or similar)
inserted from sensor side into the Ø2.1 mm thru holes.
Motor cable is connected to the 5 pole receptacle
(Hirose DF52-5S-0.8H) and sensor cable is connected
to the 6 pole receptacle (Hirose DF52-6S-0.8H). Mating
plug connectors are from the Hirose DF52 series and
should be connected with the following pin layout:
6,5
3 x M1.6
Name
Laser welds 10,35
Protruding joint
Sheet metal extender
LL06L+3
E1 SS-L
8,23
L
Pin 1 (Cable shield)
Pin 2 A+
Pin 3 B+
Pin 4 +5V
Pin 5 GND
Pin 6 Index
REV.
8 Information
Sensor
DETAIL A
SCALE
4 : 1 type with quadrature
sensor is of reflective
optical
20,15
L-3,5
02.14The
output (ABZ). Drive rod position at index is indicated in
the figure below:
L
Sheet metal extender
Mounting surface
4,44
L-3,5
8,94
L
L+3
3,6
1,67
19,6
Pin 1 Phase 1
Pin 2 Phase 2
Pin 3 Phase 3
Pin 4 Phase 4
Pin 5 GND
2,1 THRU ALL
1,5
3 x Sensor
M1.6 connector
Motor connector
1,65
8,6
1,5
2x
5
3
The sheet metal extender of the mechanical adaptor will
compensate for minor mounting misalignments so that
DETAIL A into the motor.
forces and torques are not transferred
SCALE
4:1
Connect using a M1.6 screw (or similar)
inserted into
7
2x
2,1 THRU
ALL
the Ø1.65
mm
thru
hole
of
the
sheet
metal extender.
5
3,6
8,6
10,35
d lenght
26,9
4
Note the
and only
the mounting surfaces (see figure
Pin 4 +5V
5 GND
let motorPin
rest
against
below). Pin 6 Index
15,33
19,6
Pin 3 Phase 3
Pin 4 Phase 4
protruding
joint
Pin 5 GND
15,33
Electrical Connectors
4
Mounting Instructions
Sensor connector
A Motor connector
Option 23,4
2: Fasten motor using 4,44
3x M1.6 screws into the
Pin 1 (Cable shield)
8,94 side. Beware
threaded
of short
1 Phaseon
1 motor
17 M1.6Pinholes
Pin 2 A+
2 Phase
hole 6,85
depth 1.5Pin
mm
and221,09
use appropriate screws.
Pin 3 B+
7
Mounting surface
6,85
21,09
Mounting surface
L
Laser welds
Protruding joint
Piezo LEGS Linear 6N
®
New Generation
Note
73.9
(L−26.9)
mm
for drive rod L=100.8 mm, guides G1,
and mechanical adapter M1
0-15
mm/s
no load, depending on waveform and driver
µm
one wfm-step
a
17
4
b
0.0005
Sensor Resolution
4
Sensor Accuracy
Sensor Repeatability
Stall Force
µm
±3
µm
1.25
µm
6.5
Holding5Force
2x
N
7
2,1 THRU ALL
Recommended
3 x M1.6
Operating Range
1,5
0-3
MaximumL+3
Voltage
23,4
10,35
6,85
mW/Hz
3,6
8,23
Mechanical Size
Weight
Stainless Steel
16
L
Operating Temp.
−20 to +70
4
2x
5
- with guides and sensor
- without guides and sensor
gram
L+3
Pin 1 Phase 1
Pin 2 Phase 2
Pin 3 Phase 3
Pin 4 Phase 4
Pin 5 GND
7
2,1 THRU ALL
3 x M1.6 1,5
Mounting surface
Laser welds
-Protruding
motor joint
- sensor
8,6
10,35
with 50 mm rod, guides and sensor
ºC
L
Note: All specifications are subject to change without notice.
3,6
Sheet metal extender
3
6,5
Motor connector
mm
a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC.
b. Typical values for waveform Delta, 3 N 1,65
load, temperature 20ºC.
c. Driver dependent; example with 8192 micro-steps per wfm-step.
d. At low duty cycle when motor is not heated. Sensor power consumption not included.
4,44
G1
=0.5 W at 100 Hz wfm-step frequency
Sheet metal extender
23.4 x 19.6 x 10.35
17 x 19.6 x 7
1,67
Material in L-3,5
Motor Housing
sensor E1
Pin 2 A+
Pin 3 B+
4 +5V
withPinguides
Pin 5 GND
Pin 6 Index
SCALE 4 : 1
V
Hirose DF52-5S-0.8H
Hirose DF52-6S-0.8H
Connectors
quadrature sensor
ABZ
Pin 1 (Cable shield)
for best micro-stepping
DETAIL A
performance
and life time
N
17
5
d
Pin 1 Phase 1
Pin 2 Phase 2
Pin 3 Phase 3
Pin 4 Phase 4
Pin 5 GND
c
N
7
8,6
48
L
Power Consumption
8
µm
motor resolution 0.5Sensor
nm;connector
one micro-step
Motor connector
c
1.25 (sensor E1)
15,33
6,85
Step Length
19,6
23,4
Speed Range
Unit
19,6
Maximum Stroke
LL06
15,33
Type
8,94
8
21,09
20,15
Item no.
LL06A0-xxxM1GxEx
Family name
LL
L-3,5
Mounting surface
With guides
and sensor
L
Series
06
Motor type and version
A = Standard
0 = Version number
Drive rod lengths (L)
030 = 30 mm*
060 = 60 mm
040 = 40 mm
101 = 100.8 mm
050 = 50 mm
REV.
Mechanical adapter
M1 = One adapter - Front
02.14
4,44
8,94
21,09
Guides
G0 = Without guides
G1 = With guides
Encoder (position sensor)* - only available together with guides
E0 = Without position sensor
E1 = 1.25 µm incremental optical encoder with index
Without guides
and sensor
L= *Drive
rodnot
lenght
Sensor
available with the 30 mm drive rod
STROKE= L - 26,9
Note:
All combinations are not available!
Motor and sensor cables ordered separately.
Part No
106888
Name
REV.
LL06 E1 SS-L
02.14
www.piezomotor.com
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PiezoMotor Uppsala AB
Stålgatan 14
SE-754 50 Uppsala, Sweden
150011-02
Technical Specification
Telephone: +46 18 489 5000
Fax: +46 18 489 5001
[email protected]
www.piezomotor.com
D
SC