BEIJERT ENGINEERING
Precision Technology
www.probecardtester.com
Presents :
Gram Force Measurement Technology
in a Low Cost Analyzer
SouthWest Test WorksShop
San Diego June 2004
June 2004
Beijert Engineering
Contents
1.
2.
3.
4.
5.
6.
7.
8.
9.
What can gram force do
What is so special about our sensor
Why piezo
A new revolution
Why not a strain resistor
Calibration and compensation
Characteristics
Specifications
Summary
June 2004
Beijert @ SWTW-2004
What can gram force do for you
CONTACT FORCE
„ CONTACT RESISTANCE
„ SCRUB DEPTH VARIATION
„ GENERAL QUALITY CONTROL
„ AGING MONITOR
„ PROBE DIMENSIONS MONITOR
„
June 2004
Beijert @ SWTW-2004
What can gram force do for you
„
„
Importance of constant
gramforce
Same probe length
June 2004
Beijert @ SWTW-2004
What can gram force do for you
„
Different probe length
„
Using thicker needles
June 2004
Beijert @ SWTW-2004
What can gram force do for you
„
Key factors
June 2004
Beijert @ SWTW-2004
What can gram force do for you
„
3πβD Eδ
(
g
)
F=
3
64
L
E = Young’s modelus of
„
elasticity module.
β = probe angle
4
June 2004
Beijert @ SWTW-2004
What is so special about our sensor
June 2004
Beijert @ SWTW-2004
What is so special about our sensor
June 2004
Beijert @ SWTW-2004
What is so special about our sensor
June 2004
Beijert @ SWTW-2004
Why piezo
Very small measurement
„ Very accurate
„ Linear
„ Temperature compensation
„ Piezo electrical crystals
„
June 2004
Beijert @ SWTW-2004
A new revolution?
June 2004
Beijert @ SWTW-2004
A new revolution?
„
Lifetime
„
Accuracy
„
System integration
June 2004
Beijert @ SWTW-2004
Why not a strain resistor
June 2004
Beijert @ SWTW-2004
Why not a strain resistor
„
Not accurate
„
Needs full
compensation
„
Aging
„
Others
June 2004
Beijert @ SWTW-2004
Calibration and compensation
„
Calibration
plate
June 2004
Beijert @ SWTW-2004
Calibration and compensation
„
load for linear check
June 2004
Beijert @ SWTW-2004
Characteristics
„
Piezo
„
Load cell
June 2004
Beijert @ SWTW-2004
Specifications
Pressure range sensor
„ Accuracy
„ Long term stability
„ Overload
„ Probe pitch
„ Dynamic responds time
„
June 2004
Beijert @ SWTW-2004
Specifications
„
See the difference
in probes
„
See the linearity in
probes
June 2004
Beijert @ SWTW-2004
Final GF
June 2004
Beijert @ SWTW-2004
Summary
„
Low cost FG sensor
„
No hysterese
„
Very stable results
„
Efficient add-on
June 2004
Beijert @ SWTW-2004