Stretchable and Flexible Silicon--based Solar Cell Arrays Silicon Y. Huang Depts. of Civil and Environmental Eng. and Mechanical Eng. Northwestern University Collaborator: J.A. Rogers (University of Illinois) Challenges and Objectives 90% of solar cells are made of Si. Si Si has good efficiency and reliability. Si is brittle, and fractures at 1% strain. Si panel can only be placed at roof top, top … Objectives: Make Si stretchable Investigate the mechanics issues Seek innovative applications (e.g., (e g ee-eye eye camera camera, flexible solar cell, cardiac electrophysiology, …) News agencies: United Press I t International, ti l … p y at the Display Tech Museum of Innovation, Silicon Valley, California Khang, Jiang, Huang, and Rogers, Science 311, 2006 Wavy Silicon Structures PDMS Si PDMS mother wafer: Si Fabricate thin ribbon Si device elements ε pre = dL L ε pre Bond elements to prestrained elastomeric substrate PDMS Peel back PDMS; flip over Flat Si ribbon becomes buckled due to prestrained PDMS Spring vs vs. Straight Wire Wavy Silicon: Experimental Images Scanning electron micrograph Periodic wavy structures Optical image Initial Buckling Analysis Khang, Jiang, Huang, Rogers, Science, 2006 λ0 = πhSi --- independent of pre-strain pre strain εc 23 ⎞ ⎟⎟ --- critical iti l strain t i for f ⎠ buckling Wave elength (μm) 1 ⎛ 3EPDMS ε c = ⎜⎜ 4 ⎝ ESi ε pre = 0.9% A Amplitude e (μm) A0 = hSi ε pre −1 εc Excellent agreement with experiments without any fitting parameters. 1.5 10 1.0 0.5 0.0 60 A0 = hSi ε pre −1 εc 40 20 0 0 λ0 = πhSi εc 200 400 Si thickness (nm) Stretchable Silicon at The Tech, Tech San Jose, Jose CA Electronic Eye Camera TV Networks: ABC, BBC, CBC, MSNBC, … News agencies: AFP (France), Reuters, United Press International, Xinhua, … Newspapers: Chicago Tribune, T ib Daily D il Telegraph Tl h (UK), … g Discover Magazines: Magazine, MIT Technology Review, Nature News & Views, Scientific American, U.S. News and World Report, … NSF Press Release Ko et al., Nature 454, 2008 Fabrication Steps form hemispherical PDMS transfer element compressed interconnect ~1 cm ~1 cm adhesive radially stretch PDMS form Si focal plane array and release from underlying wafer substrate cure adhesive; flop over substrate integrate optics & interconnect to control electronics to complete the device compressible interconnect transfer focal plane array onto PDMS hemispherical focal plane array Si device island (photodetector & pn diode) Ko et al., Nature 454, 2008 Pop Up Si Structure: Experimental Images Scanning electron micrograph The interconnects buckle to form “big wave” structure. Ko et al., Nature 454, 2008 Pop Up Structure: Results ε yy ε xx y ε ×10 -4 8 6 4 2 0 -2 max ε island 1 −ν ( ≈ 2π 2 island )E 3 h bridge bridge 2 island island E h 0 bridge L 20 μm x 17.5 μm 10 μm The island remains almost flat and experiences small strains. The shape of interconnects agrees well with experiments. ε pre Electronics on complex surfaces Stretchable Circuits ((Science 2008)) • Stretchability: up to 140% • Twistability TV Networks: BBC, CBC, … g Discover Magazine, g , MIT Technology gy Magazines: Review, Newsweek, Scientific American, … NSF Press Release (PNAS 2008) Bendable and Transparent Silicon Photovoltaic Devices (Nature Materials 2008) • User-definable transparency • High degrees of mechanical flexibility • Ultra-thin form factor micro-concentrator design • Excellent reliability • Good efficiency • Inexpensive TV Networks: ABC, MSNBC, … News agencies: Reuters, Xinhua, … Newspapers: New York Times, People’s Daily… Magazines: MIT Technology Review, Nature News & Views, Scientific American, … (Nature Materials 2006) Department of Energy Press Release Microscale, Inorganic Light Emitting Diode (iLED) (Science 2009) •Advantages: flexible, flexible high brightness brightness, TV Networks: N t k ABC, ABC BBC, BBC MSNBC MSNBC, … long lifetime, bidirectional emission, inexpensive. •Applications: li i wearable bl health h l h monitor i and diagnostics, biomedical imaging devices, ... News agencies: Reuters, … Newspapers: Boston Globe, Globe New York Times, … Magazines: MIT Technology Review, … Cardiac/Neural Electrophysiology ((Science,, 2010;; Science Translational Medicine,, 2010;; Nature Materials, 2010) 1 cm 75μm 25μm 2.8μm unwrapped 2.8μm unwrapped 7.0μm wrapped wrapped wrapped 0.3 cm Health monitoring and humanelectronics i t interaction ti 75μm Conclusions and Recent Publications -- Mechanics plays an important role in the d l development off flexible fl ibl andd stretchable h bl technologies. h l i JMPS ((2008, 2009, 2010)) Nano Letters (2007, 2008, 2009a,b, 2010) Nature (2008) Nature Materials (2006, 2008, 2010) Nature Nanotechnology (2006) PNAS ((2007, 2008, 2009)) PRL (2010) Science (2006, (2006 2008, 2008 2009, 2009 2010) Science Translational Medicine (2010) Cover of NSF Budget Request to Congress for fiscal year 2011 “Researchers Researchers Yonggang Huang at Northwestern University and John Rogers at the University of Illinois at Urbana-Champaign have developed circuits that can stretch, bend and even twist! … Potential uses include flexible sensors, sensors transmitters, and new photovoltaic p oto o ta c a and d microfludic c o ud c devices, as well as areas of medicine and athletics.” Global vs Local Buckling— Buckling—1D Buckling Global buckling happens when the substrate is relatively thin and long; otherwise, local buckling happens. Global vs Local Buckling— Buckling—2D Buckling At a certain thickness of the thin film, for the same length and width of plate, local buckling occurs when the substrate is relatively thicker. Single Crystal Si and Mother Wafer SiO2 single crystal Si single crystal Si etch SiO2 mother wafer: single crystal Si three layers are strongly bonded mother wafer: single crystall Si silicon ribbons sitting on the mother wafer Electric Performance Khang, Jiang, Huang, Rogers, Science, 2006 2 Currrent Density (mA/cm m) 150 stretch/compr. Al Al n p stretch/compr. 50 μm 100 50 -7.58% -3.79% 0% 3.03% 7.58% 15.56% 22.73% model dark 0 -50 50 -2 light -1 0 Bias Voltage g ((V)) • Wavy Si does not affect the electric performance. 1 Pixel Distribution: Compare with experiment i • The analytical results agree well with experiments • The density change of pixels due to deformation is around 10%, which is fairly small • The distribution of pixels after deformation is quite if
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