Smart Sensors ZS-series
2D CMOS Laser Type
Manufacturing with a View to the Future.
Smart Sensors for High-precision
Displacement Measurements.
The Birth of a New-generation 2D Measurement Displacement Sensor
The pursuit of 2D CMOS and other advanced functions will respond to application needs through optimum technology.
Our challenge to create the smallest and most lightweight compact sensor will enhance suitability to user applications.
And, our commitment to user operability will aid all sensing applications.
02
INDEX
Beyond Evolution
A digital fusion of high-precision displacement
measurement and image sensing.
And even greater evolution for the Smart Sensors.
Concepts
02
Product Lineup
04
Sensor Heads
06
Sensor Controllers
10
Multi-Controllers
11
Data Storage Units
12
SmartMonitor
Professional Software
14
Specifications
18
Dimensions
21
So that all those who pursue ultimate quality can easily acquire high-precision
sensing data, OMRON has changed its manufacturing focus to Zero.
The Zero Smart concept will make its way into a variety of fields.
Sensing Variations
Laser displacement:
2D CMOS
Platform (Controller/Amplifier)
ZS series
Information Handling
Multi-Controller
SmartMonitor Zero
Camera: High-speed CCD
ZFV series
Data Storage Unit
Evolution
ZX series
03
Smart Sensor
Advanced technology is carried.
Advanced Functions Integrated
Easy Handling of High-grad
USB
Monitor
Record
Control
SmartMonitor Professional ZS-SW11E
Data Storage Unit ZS-DSU
Multi-Controller ZC-MDC
The ZS-series SmartMonitor Professional
Software now appears with expanded functionality.
Ideal for ZS Series Data Logging!
Enables full application of Sensor Controller
information.
Meets a wide range of logging needs.
High-speed simultaneous multichannel waveform graphs.
Excel macro provided for simple analysis.
04
Enables onsite high-speed logging of data from Sensor Controllers or MultiControllers in external memory (compact flash card).
Effective for building traceability systems, statistical process control (SPC),
and much more.
High-speed sampling rate: 150 µs
Powerful support for logging data using various trigger functions.
Transfers data between multi-connected Sensor
Controllers and performs high-speed multiprocessing.
Connects to up to nine Sensor Controllers.
More
More
More
P. 14
P. 12
P. 11
into a Compact Sensor for
e Sensing Applications
Measuring
center distance
Diffuse-reflective Models
200
Regular-reflective
Models
ZS-LD200
Business Card Size
ZS-LD80
80
ZS-LD50
50
40
ZS-LD40T
20
ZS-LD20T
Operate
900 x 100 µm
See
900 x 60 µm
900 x 60 µm
Sensor Controllers ZS-LDC
Sensor Heads ZS-LD
Enable maximum sensing performance with
fully digital processing.
Advanced sensing technology packed into
the smallest Sensor Heads in this class.
Enable easily taking complete advantage of the ultimate
in measurement performance.
Business Card Size
USB provided as a standard feature.
2000 x 35 µm
900 x 25 µm
Line beam
Five models to pick from, from a High-precision Long-range
(200-mm) Model to a High-precision Short-range Model.
More
More
P. 10
P. 06
05
Smart Sensor
Advanced technology is carried.
ZS-LD200
2D CMOS
image sensor
Ultra-high-sensitivity
lens
*The ZS-LD50 uses
high-precision ganged
lenses.
Laser Class 2
Degree of protection: IP-67
(Models with 2 m cable)
Advanced sensing technology packed
into the smallest Sensor Heads in
this class.
The three basics of sensing–speed, sensitivity, and precision–have been balanced to
meet application needs with the best methods possible.
Super-high-speed Sensing at 100 µs
High
Speed
Measurement range:
10 mm
ZS-LD50
Measuring center: 50 mm
Line beam
(900 x 60 µm)
Measurement range:
30 mm
ZS-LD80
Measuring center: 80 mm
Line beam
(900 x 60 µm)
High
Sensitivity
Stable Detection with
Reduced Color and
Gloss Error
Long Range
with Margin
Measurement range:
100 mm
ZS-LD200
Measuring center: 200 mm
You get exact sensing for the precision required for
workpiece inspection.
Unique OMRON algorithms reduce detection error
to improve workpiece measurement accuracy.
Error (+)
ZX-L Series
Stable sensing is achieved over
the entire range from dark
colors to shinny workpieces.
The dynamic range has been
greatly improved by the 2D
CMOS and high-sensitivity lens
to increase the range of
applicable workpieces.
ZS-L Series
Dispersion
Regular
reflection
Transparent
objects
=
Mode
Absorption
=
Diffuse-reflective Model
High resolution: 0.8, 2, or 5 µm
(ZS-LD50/LD80/LD200)
=
06
Line beam
(900 x 100 µm)
High
Precision
=
The Sensor Head can be changed to either Diffusereflective or Regular-reflective operation by
changing the installation method.
Measured values will be compensated correctly
even if the Sensor Head is changed according to
the application.
You get exact sensing with superior workpiece following performance.
Both CMOS high-speed data reading (high-speed sampling) and a
dynamic light reception range are achieved. Accurately catches moving
workpieces inline.
(A CMOS gain setting has been added to the Sensor Controller.)
Standard
PCB (resin)
Mirror
Glass
Average samples: 128, High-precision mode.
Ideal Application Examples for Each Distance Range
ZS-LD200/LD80
Moving Workpieces
(Black Rubber)
Measuring Door
Attachment Offsets
Measuring Tire Exteriors
Measuring Car Bodies
ZS-LD50/LD80
Stable Measurements for PCBs,
Black Resin, and Metal
All you need to do is select the proper mode to achieve stable sensing of PCBs,
resins, black rubber, and other light-penetrating workpieces (which could not be
easily handled with previous reflective laser displacement meters.
Just select High-precision Mode to stably measure black rubber.
Just select Penetration Mode to stably measure PCBs or black resin.
Inspecting coplanarity of pair
boards or electronic components.
Digital Camera
Tube Lens Inspection
Board Height Inspection
Ideal for measuring board height
to control the height of dispensing
nozzles for board adhesive coatings.
DVD Chassis
Flatness Inspections
Ideal for inspecting lens holder feed
operation for digital camera autofocus mechanisms. Helps prevent
faults and increase quality.
DVD chassis flatness inspections,
which were previously performed
with contact displacement sensors,
can be performed without contact.
Stable measurements are achieved by correctly recognizing the light reception
distribution on the 2D CMOS.
Although previously difficult with laser displacement sensors, detection is possible for PCBs and other workpieces that allow light to penetrate.
The sensing algorithms implemented in the ZS-L enable stable detection of the surface of workpieces that allow light to penetrate.
Solder surface (land)
Light intensity on the CMOS light
reception surface
Affect of laser
light penetration
(affect on peak
position
calculation)
Position of peak
position (solder surface)
correctly calculated.
Solder surface (land)
(Laser light does not penetrate.)
The sensing algorithm implemented
in the ZS-L selects the right
measurement level for the lightpenetrating workpiece and
accurately detects the position of the
surface of the workpiece.
Even if the reflected light distribution
(line brightness) is distorted, stable
measurementsare possible for
positions near the surface (peak
density positions) with little error.
Light is reflected
normally from
the solder surface.
Received light
amount
Measuring the Shape of
Black Resin Workpieces
Measuring the Shape PCB
Surfaces
Complete measurement data will be
obtained at angles of up to 40 °.
PCB shapes can be measured without
burs or waveform disruptions.
Gain setting: 5
0
10
5.000
20
0.000
30
–5.000
Direct setting
with function
keys
Response: 8 ms, High-precision mode,
Black gain: 0, Red gain: 5 (max.)
15.000
10.000
FUN (setting mode)
1.75
1.73
1.71
1.69
40
1.67
–10.000
1.65
–15.000
Number of data
Penetration mode and gain settings used.
PCB surface
Light intensity on the CMOS light
reception surface
PCB surface
(Laser light
penetrates.)
Set sensing
directly.
Typical Examples
Height (mm)
Inspecting for
Board Coplanarity
Height (mm)
ZS-LD80/LD50
Close
Far
Displacement
Peak position is offset due
to measurement error.
Light is reflected by
both the resin surface
and particles in the
resin.
(3) Edge
Close
Peak density
Far
Setting Software: SmartMonitor Professional
Directly Measure the Surfaces of PCBs
Displacement
Edge center position
(2) Measurement level
setting
The SmartMonitor Professional software provides a function that changes
measurement levels (edge thresholds) to
reduce error caused by light penetration,
enabling handling many types of PCBs.
The measurement level can be increased to
adjust the measurement position for peak
light reception.
This function enables stable detection of
PCB surfaces.
If there is insufficient light in High-speed
Mode, gain settings (0 to 5) can be used to
compensate.
100 %
87.5 %
Shift
50 %
Amount of
displacement
When there is light penetration, the measurement level is set to 87.5%.
0%
(1) Background
suppression level
Peak density position = Edge center position (optimal calculation of (1) to (3))
Actual Light-penetrating
Workpiece (PCBs)
Display the light reception
distribution (line brightness) on
the CMOS during detection.
Connect directly to
a computer using USB
USB Connection
07
Smart Sensor
Advanced technology is carried.
ZS-LD40T
The Only Way to Measure Glass
Stably measure height and undulations in transparent, coated, or colored glass
on work tables.
2D CMOS
image sensor
Menus let you easily set the measurement conditions for a wide range of glass to achieve stable
measurements.
Stable detection at 40 mm with a line beam of 2 mm.
High-precision ganged lenses
Laser Class 2
Degree of protection: IP-67
(Models with 2 m cable)
A 2-mm line beam reduces in influence of the black and white pattern on granite work tables to
achieve stable measurements.
Sensing Performance for Measurement Stability and High-speed Response
Submicro resolution (0.25 µm) has been achieved for moving measurements (8 ms) of glass and
mirror-surface wafers. (Actual Values)
ZS-LD20T
Measuring center: 20mm
Resolution: 0.25 µm
Line beam
(2000 x 35 µm)
Measurement range:
2 mm
Moving Measurements
Typical Examples (High-speed Mode, Response: 8 ms)
Measurements for Moving Glass
[µm]
Line beam
(900 x 25 µm)
ZS-LD40T
Measuring center: 40 mm
Resolution: 0.4 µm
Regular-reflective Models
08
Measurement range:
5 mm
4
3
2
1
0
–1
–2
–3
–4
Glass, Response: 8 ms
0.25 µm
Measurements for Moving Mirrored
Surfaces (Wafers)
[µm]
4
3
2
1
0
–1
–2
–3
–4
Mirror, Response: 8 ms
0.25 µm
Ideal Application Examples for Each Distance Range
ZS-LD40T
Glass Surface
Measurements
Glass Undulation
Measurement
Glass Height Inspections
(Autofocus)
HDD Surface Deflection
Inspection
ZS-LD20T
The Only Way to High-precision
Displacement Measurements
Superior Features for Semiconductor Wafer, Glass, and Other Measurements
Requiring Precision
Ideal for measuring glass thickness and nozzle gaps when coating glass with resist or sealer.
Perform high-precision thickness
and undulation measurements of
many types of FPD glass.
Helps improve quality and yield.
Ideal for autofocus applications in
inspection cameras for glass PCBs.
ZS-LD20T
High-speed response and stable
measurement performance enable
high-precision measurements of
surface deflection in mirrorsurface hard disks.
Measuring Electrode
Thickness on Dielectrics
Measuring Wafer Warping
and Thickness
An unbelievable stationary measurement precision of 0.01 µm (10 nm*), the highest in this product
class. * nm (nanometer) = 10-9 m
Easy Sensing with an HMI That Couldn't Be Easier to Use
A New Glass Mode
Set sensing directly.
FUN (setting mode)
Direct setting with
function keys
Glass
Glass thickness
LVDS digital processing and line beam application enable unbelievably stable
measurements.
Mechanisms for High Resolution
Clock 2
Controller
Clock 1
Received Light Signal Control
Indu
rst
stry Fi
High resolution is achieved by eliminating clock
offset to create a super-stable image signal.
(Achieving 1/5th to 1/10th of previous resolution.)
Results
Received light distribution
on CCD
Error A
L
V
D
S
Sensor Head
Processing
Clock 1
OMRON's previous CCD method
Received light
level
Error B
Received light distribution
on CMOS
Offset eliminated using
laser pulse control.
Level
Clock 2
Laser Pulse Control
The light quantity can be adjusted to any value
between a few µs and up to 80 ns. This enables
achieving the ideal light quantity for the
workpiece to reduce
80 ms min.
measurement error.
Error A
Exact
match!
Error B
Offset eliminated using
received light signal control.
Amount of displacement
Amount of displacement
Mechanisms for Stable
Measurement
Averaging Effect of
a Line Beam
Glass gap
Menu selections for glass, glass thickness, and
the glass gap have been provided to enable
easily setting glass measurement conditions.
Setting Software: SmartMonitor Professional
The SmartMonitor Professional can be used to set
the glass thickness and gap while monitoring the
CMOS light reception image to enable accurately
setting the measurement surface. (There are also
menu selections for setting the measurement area
and other conditions.)
Height of front glass surface
Connect directly
to a computer
using USB
Spot beams can be unstable depending on
the measurement location.
Line beams produce an averaging affect that
is less likely to be affected by surface
irregularities, creating stable measurements.
Height of back glass surface
USB Connection
09
Smart Sensor
Advanced technology is carried.
Sensor Controllers ZS-LDC
Enable maximum sensing performance with
fully digital processing.
A controller the size of a business card filled with OMRON's leading-edge digital technology.
Enable easily taking complete advantage of the ultimate in measurement performance.
Easy Sensing with an HMI That Couldn't Be Easier to Use
Information at the Touch of a Button
Set sensing directly.
In RUN (measurement) Mode, measured values and information are
displayed using 2 rows of 8-segments LEDs.The large LED display improves
visibility. Measurement information includes the threshold, current,
resolution, and received light amount and is available with simple key
operations. LCD screens can be customized to change the display of desired
information to easier-to-understand terminology.
In FUN (setting) Mode, setting menus are displayed on the 2 rows of the LCD.
The many display capabilities of the LCD provide easy-to-understand
guidance for making settings. Function keys corresponds to displayed menu
items, and measurement conditions and other settings can be made
intuitively. You can also easily switch between Japanese and English
displays. Communication with the operator is better than ever before.
RUN
(measurement mode)
Device:
OMRON #1
MAIN:MEASURE
SUB :THRESH
Threshold
Threshold, current, resolution, brightness, etc.
MAIN:MEASURE
SUB :THRESH
MAIN:MEASURE
SUB :CURRENT
Current
Switch measurement information at
the touch of a button.
MAIN:MEASURE
SUB :RESOLU
Resolution
Mount to DIN Track or directly to
control panels.
Patent pending.
FUN (setting mode)
Measured value displayed.
Example of
Display Customization
Patent pending.
Direct setting with
function keys
LD POWER 80.0%
SUB:BRIGHT
Brightness
Connect directly to a PC using USB
USB 2.0 and RS-232C provided as standard
features.
LVDS, a new-generation high-speed
communications interface, is used between the
Sensor Head and Controller, an industry first. If USB
is used to connect to the computer, high-speed alldigital measurement data transfer is possible.
Panel Mounting Adapter (option, sold separately)
10
USB Connection
Smart Sensor
Advanced technology is carried.
Multi-Controllers ZS-MDC
Enables full applications of Controller information.
Transfers data between multi-connected Controllers and performs high-speed
multiprocessing.
High-speed Connections for Up To 9 Controllers
See the difference in applications requiring multi-point measurement, such as thickness, steps, and flatness measurements. Connect
up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing prevents data dropouts to provide the capability
to measure exactly what is seen. (Sampling speed with 3 Controllers connected: 110 µs, Sampling speed with 9 Controllers connected:
380 µs)
Multi-Controller
Sensor Heads
SmartMonitor Software
The support software makes
settings easy.
USB
Multi-point measurement
(flatness of resins or metals)
Processing results
ZS-MDC
Processing Enabled by the Multi-Controller
Flatness Calculations
Reference Step Calculations
Absolute Step Calculations
Twisting Calculations
Calculating the difference between the
maximum and minimum values:
Calculating the difference between a
reference point (A) and other points:
Calculating the difference between all points:
Calculating twisting between opposing sides:
C
A
C
A
B
B
Number of Sensor
Controllers: 3 to 9
Number of Sensor
Controllers: 3 to 9
Calculation:
B
TASK1 = A – B
TASK2 = B – C
TASK3 = C – A
TASK1 = A – B
TASK2 = A – C
•••
Individual judgements
Calculation: TASK1 = Max. (A,B,• • •) – Min. (A,B,• • •)
A
Number of Sensor
Controllers: 3 to 9
Calculation:
C
A
Individual judgements
B
D
C
Number of Sensor
Controllers: 4
Calculation: TASK1 = (A – B) – (D – C)
Multipoint Thickness Calculations
Average Height Calculations
Warp Calculations
User-set Calculations
Calculating the difference between pairs of points:
Calculating the average surface height:
Calculating warping between selected sides:
Formulas can be flexibly set.
A
B
C
D
E
F
Number of Sensor
Controllers: 2, 4, 6, or 8
Calculation:
TASK1 = K+(A – B)
TASK2 = K+(C – D)
TASK3 = K+(E – F)
Individual judgements
C
A
B
B
Number of Sensor
Controllers: 2 to 9
Calculation: TASK1 = Ave. (A,B,C, • • •)
A
C
Number of Sensor
Controllers: 3
K + mX + nY
Calculation: TASK1 = B – (A+C)/2
11
Smart Sensor
Advanced technology is carried.
Data Storage Units ZS-DSU
Ideal for ZS Series Data Logging
Enables onsite high-speed logging of data from Sensor Controllers or Multi-Controllers in
external memory (memory card).
Effective for building traceability systems, statistical process control (SPC), and much more.
High-speed sampling rate: 150 µs
Powerful support for logging data using various trigger functions.
Configuration
Number of connectable
Controllers
10 max. (ZS-MDC: 1, ZS-LDC: 9 max.)
Applicable Controllers
ZS-LDC
Data resolution
32 bits
Sampling rate
•Shortest high-speed logging mode (One-shot Mode)*1
•Long-term logging mode (Repeat Mode)*2
•Sampling period: 10 ms to 1 h (at 1-ms intervals)
Performance
Trigger functions
Functions
Other functions
Software (included)
Start and end triggers can be set separately.
External trigger/data trigger (self-trigger)
Time trigger
•External bank function
•Alarm output function
•Saved data format customization function
•Time function (timestamps)
•CSV file generation tool
•Excel macro for simple analysis
(Equivalent to software provided with SmartMonitor Professional.)
*1: For One-shot Mode
Connected to ZS-LDC
Number of
channels
1
2
4
9
Min. sampling interval
150 µs
200 µs
350 µs
650 µs
*2: For Repeat Mode (Logging time depends on capacity of Memory Card.)
Example for 64-MB Memory Card
Longest logging time
10 min
6.5 min
5.5 min
4.5 min
(Typical Examples)
Connected to ZS-MDC
Number of
channels
1
2
4
9
12
Min. sampling interval
350 µs
400 µs
500 µs
700 µs
and ZS-MDC
Longest logging time
20 min
12 min
8 min
5 min
(Typical Examples)
Number of
channels
1
2
4
9
Min. sampling interval
10 ms
10 ms
10 ms
10 ms
Longest logging time
20 h
10 h
5h
2h
(Typical Examples)
A Wealth of Functions for Essentially Any Application
1 Selection
Select
"Simple" Configuration for
Inspection Process
2 Testing/Installation
3 Operation
4 Maintenance
Test and Install
Operate
Maintain
Data can be logged at high speed.
Simple Changeovers between
Inspection Processes
Data can be saved at high speed during testing and
system verification.
That's just one example of the type of need that can
be met by high-speed logging.
Controller setting information can be saved in the
ZS-DSU as bank data. Bank data can then be
transferred to switch banks for
the ZS-LDC/MDC.
Simple Backup for Inspection Process
Measurement and setting data saved in Memory
Cards can be easily uploaded to a computer.
This enable easily backing up inspection process data.
Easy Data Analysis
Select between Short-term High-speed Logging
Mode and Long-term Logging Mode.
The analysis tool that is provided can be used to
analyze logging data.
Heavy system for each process
Bank data
ZS-DSU
ZS-LDC
Save Only the Required Data
Many Save Triggers
Easier Error Value
Detection
Alarm Output Function
This is all that's required for
a simple inspection/data
storage system.
(Supports separating
the inspection process.)
When data exceeds a set level,
alarm outputs (high high and
low low outputs) can be
output from the Controller
in addition to the high,
pass, and low outputs.
Data during operation can be massive. Save only the
required data by using any of many trigger functions.
The trigger functions can be effectively used in
building traceability systems.
External input triggers
Self-triggers based on measured values (save only
specific ranges of data)
Time triggers
Judgement value triggers
Pre-triggers (saves data from before the trigger)
13
Smart Sensor
Advanced technology is carried.
SmartMonitor Professional
ZS-SW11E
The ZS-series SmartMonitor Software
enables changing setting from PC.
Meets a wide range of logging needs.
Log measurement results at various times to leave judgement and inspection results.
High-speed simultaneous multichannel waveform graphs.
In High-speed Mode, display waveforms at intervals as short as 2 ms.*
In Multichannel Waveform Mode, display up to 9 waveforms simultaneously.
*Data may be broken up depending on the computer environment. Use a computer that meets or exceeds the
recommended environment specifications.
Excel macro provided for simple analysis.
Data collected by logging can be processed with the Excel macro using filters, slope
compensation, filter median transitions, differentiation, integration, and math functions and used
to nominal judgements and other determinations.
Multi-channel Waveform Displays
Sensing (Light Brightness)
Logging
Analysis
Recommended Operating Environment
SmartMonitor Professional
OS: Windows 2000 or XP
CPU: Pentium III, 850 MHz or higher (Recommended: 2 GHz or higher)
Memory: 128 MB or higher (Recommended: 256 MB or higher)
Available hard disk space: 50 MB or more
Display: 800 x 600 dots, High Color (16-bit) or higher
(Recommended: 1024 x 768 dots, True Color (32-bit) or higher)
If the recommended specifications are not used, data may be broken in the
middle or waveforms may not be displayed properly for logging, high-speed
graphs, and multi-channel waveforms.
SmartAnalyzer Macro Edition
This is a Microsoft Excel macro program; Microsoft Excel 2000 or higher is
required.
14
Logging Menu
Logging Timing: External Input
External Signal Input
Button input
External Signal Input, Continuous
Measured values are all saved when
a workpiece arrives.
Simple logging can be performed
when a button is input.
Measurement results are collected
continuously during an interval.
Gap inspections
Flatness inspections
Shape inspections
Logging started Logging ended
Logging started
Logging started Logging ended
Logging
Logging
Logging
ON
ON
Button pressed.
OFF
Button pressed.
OFF
Logging Timing: Self-trigger
Self-trigger
Judgement Value Trigger
Self-trigger, Continuous
Time Trigger
The measured values for all Sensors are
collected when the measured value for
one Sensor exceeds the trigger level.
Measured values are collected when a
measured value produces a NG result.
Continuous data before and after the
trigger is collected.
Data is collected continuously while a
measured value is above or below a
specific value. Data can also be collected
for a specific period of time after the selftrigger.
Measured values are collected when a
specified time is reached.
Daily Logging at a Set Time
Set time (hh:mm:ss)
Judgement value
Trigger level
Trigger level
NG
Logging
Logging
Logging
Logging
Logging started
Logging data starts from before
the time the NG occurred.
Logging started
Logging ended
Logging started
*The timing for ending logging must be set separately from the timing to start it. The following options are available.
•External signal input, •Button input, •Self-trigger, •Time of day, •Length of time, •Number of data points
15
Smart Sensor
Advanced technology is carried.
Intelligent Unit System: Connect and Expand
When Calculations
Are Not Required
When Calculations
Are Required
Management
Application
Control
Application
Data Storage Unit
(ZS-DSU)
Sensor Controller
(ZS-LDC)
Sensor Controller
(ZS-LDC)
Expansion for
connection to the
ZFV scheduled for
future release.
Data Storage Unit
(ZS-DSU)
Multi-Controller
(ZS-MDC)
Sensor Controller
(ZS-LDC)
Sensor Controller
(ZS-LDC)
Sensor Controller
(ZS-LDC)
Sensor Controller
(ZS-LDC)
(Connect up to 9 Sensor Controllers.)
Measurement information
ZS-LDC/MDC setting
information
ZS-SW11E SmartMonitor Professional Software
1 Setting 2 Logging 3 Multi-channel Waveform Display 4 Analysis
ZS-DSU setting information
Transferring bank data
16
Settings can be changed
using CompoWay/F or
no-protocol communications
commands.
USB Connection
Batch Data Output
*Communications commands can be used to upload collected data via a USB or RS-232C connection.
Select either the CompoWay/F (PLC format) or no-protocol communications.
Standard Models
Smart Sensor
Accessories (Sold Separately)
Sensor Heads
Optical system
Diffuse reflection
Regular reflection
Controller Link Unit
Sensing distance
Beam diameter
Resolution*1
Model
0.8 µm
ZS-LD50
900 X 60 µm
2 µm
ZS-LD80
900 X 100 µm
5 µm
ZS-LD200
20±1 mm
900 X 25 µm
0.25 µm
ZS-LD20T
40±2.5 mm
2000 X 35 µm
0.4 µm
ZS-LD40T
50±5 mm
900 X 60 µm
80±15 mm
200±50 mm
Shape
Model
ZS-XCN
Panel Mount Adapter
Shape
Model
Sensor Controllers
Shape
Supply voltage
Control outputs
NPN outputs
For 1st Controller
ZS-XPM2
For expansion
(from 2nd Controller on)
ZS-LDC11
24 VDC
PNP outputs
ZS-XPM1
Model
ZS-LDC41
RS-232C Cable for Connecting to a Personal Computer
Shape
Model
Qty
Multi-Controllers
Shape
Supply voltage
Control outputs
NPN outputs
ZS-MDC11
PNP outputs
ZS-MDC41
Data Storage Units
Supply voltage
Control outputs
Model
1
Extension Cables for Sensor Heads
Qty
Model
Cable length
24 VDC
Shape
ZS-XRS2
Model
1m
ZS-XC1A
1
4m
ZS-XC4A
1
5m
ZS-XC5B (*1 *2)
1
8m
ZS-XC8A
1
10 m
ZS-XC10B (*1)
1
*1. Up to two ZS-XC B Cables can be connected. (22 m max.)
*2. A Robot Cable (ZS-XC5BR) is also available.
Logging Software
NPN outputs
ZS-DSU11
24 VDC
PNP outputs
ZS-DSU41
Model
Name
SmartMonitor
Professional
ZS-SW11E
Memory Card
Model
Capacity
F160-N64S(S)
64 MB
QM300-N128S
128 MB
F160-N256S
256 MB
17
Smart Sensor
Advanced technology is carried.
Specifications
Sensor Heads
Item
ZS-LD50
ZS-LD40T
ZS-LD20T
Model
ZS-LD200
ZS-LD80
ZS-LDC Series
Applicable Controllers
Regular reflection
Diffuse reflection
Measuring center distance
20 mm
6.3 mm
40 mm
30 mm
50 mm
47 mm
80 mm
78 mm
200 mm
200 mm
Measuring range
±1 mm
±1 mm
±2.5 mm
±2 mm
±5 mm
±4 mm
±15 mm
±14 mm
±50 mm
±48 mm
Optical system
Regular reflection
Diffuse reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Diffuse reflection
Regular reflection
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., Class 2)
Light source
Beam diameter*1
900 X 25 µm
2000 X 35 µm
0.25 µm
0.4 µm
0.04 % F.S./°C
0.02 % F.S./°C
Linearity*2
900 X 60 µm
900 X 60 µm
900 X 100 µm
0.8 µm
2 µm
5 µm
0.02 % F.S./°C
0.01 % F.S./°C
0.02 % F.S./°C
±0.1% F.S.
Resolution*3
Temperature characteristic*4
Sampling cycle*5
±0.25% F.S.
110 µs
NEAR indicator
Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator
Lights near the measuring center distance, and further than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Indicators
Operating ambient illumination
Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature
Operating: 0 to 50°C, Storage: –15 to 60°C (with no icing or condensation)
Ambient humidity
Degree of protection
Materials
Cable length
Weight
Accessories
Operating and storage: 35% to 85% (with no condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67
Case: Aluminum die-cast, Front cover: Glass
0.5 m, 2 m
Approx. 350 g
Laser labels (1 each for JIS/EN, 3 for FDA), Ferrite cores (2), Insure Locks (2), Instruction Sheet
*1. Defined as 1/e2 (13.5 %) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
*2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.
*3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard
workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.
*4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
*5. This value is obtained when the measuring mode is set to the high-speed mode.
18
Sensor Controllers
Model
Sensor Controllers
ZS-LDC11
ZS-LDC41
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1024, 2048, or 4096
No. of samples to average
Number of mounted Sensors
1 per Sensor Controller
Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)
Connection method
Serial I/O
USB 2.0
Judgement outputs
External interface
Outputs
Linear output
Inputs
Laser OFF, ZERO reset timing,
RESET
Status indicators
3 outputs: HIGH, PASS, and LOW
PNP open-collector, 50 mA max., residual voltage: 1.2 V max.
Selectable from 2 types of output, voltage or current (selected by slide switch on base).
Voltage output: –10 to 10 V, output impedance: 40 Ω
Current output: 4 to 20 mA, maximum load resistance: 300 Ω
ON: Short-circuited with 0V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited to supply voltage or within 1.5 V of supply voltage
OFF: Open (leakage current: 0.1 mA max.)
HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green)
Main display
8-segment red LED, 6 digits
Sub-display
8-segment green LED, 6 digits
Setting keys
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
LCD
Setting inputs
1 port, 115,200 bps max.
3 outputs: HIGH, PASS, and LOW
NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max.
Display: Measured value, threshold value, voltage/current, received light amount, and resolution
Sensing: Mode, gain, measurement object, head installation
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgements (hysteresis and timer), non-measurement, and bank (switching and clear)
System: Save, initialization, measurement information display, communications settings, key lock, language, and data load
Functions
Segment display
1 port, Full Speed (12 Mbps), MINI-B
RS-232C
Power supply voltage
21.6 V to 26.4 VDC (including ripple)
Current consumption
0.5 A max. (when Sensor Head is connected)
Ambient temperature
Operating: 0 to 50°C, Storage: –15 to 60°C (with no icing or condensation)
Ambient humidity
Materials
Weight
Accessories
Operating and storage: 35% to 85% (with no condensation)
Case: Polycarbonate (PC)
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1), Instruction Sheet
19
Smart Sensor
Advanced technology is carried.
Specifications
ZS-MDC11/MDC41 Multi-Controllers
Controller Link Unit
Basic specifications are the same as those for the Sensor Controllers.
The following points, however, are different.
(1) Sensor Heads cannot be connected.
(2) A maximum 9 of Controllers can be connected.
Control Link Units are required to connect Controllers.
(3) Processing functions between Controllers: Math functions
Connection Using
the ZS-XCN
Controller Link Unit
Data Storage Unit
Multi-Controller
Sensor Controllers
ZS-DSU11/DSU41 Data Storage Units
Item
Model
ZS-DSU11
ZS-DSU41
Number of mounted Sensor Heads
Cannot be connected
Number of connectable Controllers
10 Controllers max. (ZS-MDC: 1 Controller, ZS-LDC: 9 Controllers max.)*1
Connectable Controllers
ZS-LDC
Connection method
Serial I/O
External interface
USB 2.0
1 port, 115,200 bps max.
3 outputs: HIGH, PASS, and LOW; NPN open-collector,
30 VDC, 50 mA max., residual voltage: 1.2 V max.
3 outputs: HIGH, PASS, and LOW; PNP open-collector,
50 mA max., residual voltage: 1.2 V max.
ON: Short-circuited to supply voltage or within 1.5 V of supply voltage
OFF: Open (leakage current: 0.1 mA max.)
ON: Short-circuited with 0 V terminal or 1.5 V or less
OFF: Open (leakage current: 0.1 mA max.)
Inputs
32 bits
Data resolution
Logging trigger functions
Other functions
OUT (orange), PWR (green), ACCESS (orange), and ERR (red)
8-segment green LEDs, 6 digits
Segment display
16 digits x 2 rows, color of characters: green, resolution per character: 5 x 8 pixel matrix
LCD
Setting inputs
Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers
External banks, alarm outputs, saved data format customization, and clock
Status indicators
Setting keys
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Slide switch
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage
21.6 V to 26.4 VDC (including ripple)
Current consumption
0.5 A max.
Ambient temperature
Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation)
Ambient humidity
Materials
Weight
Accessories
*1: Control Link Units are required to connect Controllers.
20
1 port, Full Speed (12 Mbps), MINI-B
RS-232C
Outputs
Functions
, ZS-MDC
Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)
Operating and storage: 35% to 85% (with no condensation)
Case: Polycarbonate (PC)
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1) Instruction Sheet, Tools for Data Storage Unit: CSV File Converter for Data Storage Unit, Smart Analyzer Macro Edition (Excel macros for analysis of collected data)
Dimensions
Sensor Heads
8
15.30
Reference
surface
Range
indicator
8
Reception
axis
56
65
56±0.1
45
56
65
Emitter
Emission
axis
Emitter
Emission
axis
Reception
axis
4
M
2-
8
Receiver
4.5
56±0.1
45
30
Measuring
center
4
Mounting hole dimensions
56
56± 0.1
8
Two, 4.5 mm dia.
mounting holes
65
L (Note 1)
56±0.1
27.1
11
Reference
surface
35
4.5
8
Measuring
center
(unit: mm)
ZS-LD20T/LD40T
Two, 4.5 mm dia.
mounting holes
4
65
27.1
L (Note 1)
4.5
35
Receiver
Range
indicator
8
15.3
8
ZS-LD50/LD80/LD200
4
M
2-
8
4.5
Mounting hole dimensions
56
8.5
A° (Note 1)
30.1
8.5
A° (Note 1)
30.1
42
Standard length: 0.5 m
Note 1 ZS-LD50: L = 50, A = 25°
ZS-LD80: L = 80, A = 15°
ZS-LD200: L = 200, A = 8°
42
Connector
Vinyl insulated round cable,
6.2 mm dia.
Connector
Vinyl insulated round cable,
6.2 mm dia.
Note 1 ZS-LD20T: L = 20, A = 45°
ZS-LD40T: L = 80, A = 15°
Standard length: 0.5 m
Multi-Controllers
Data Storage Units
ZS-LDC11/LDC41
ZS-MDC11/MDC41
ZS-DSU11/DSU41
23.20
Sensor Controllers
59.85
52.50
60
4.7
4.8
60
5.2
52.50
13 10
3.90
13 10
di
.7
11
a.
di
10.80
24.20
18
32.90
13 10
18
32.90
24.20
18
32.90
24.20
a.
.7
11
10.80
4.30
3.90
10.80
4.30
4.30
3.90
90
90
11
4.61
60
52.50
.7
11
a.
di
21
Smart Sensor
Advanced technology is carried.
Panel Mount Adapters
ZS-XPM1/XPM2 (Dimension for Panel Mounting)
(60 X n) + 12
60 X n
Panel
(unit: mm)
13
3
Panel cutout dimensions
116±1
(140)
122
90
DIN track
Panel
Panel Mount Adapter
(2)
(37.5)
(Note 1)
Note 1: Dimensions are shown for a panel thickness of 2.0 mm.
Safety Precautions for Using Laser Equipment
WARNING
Do not expose your eyes to the laser
radiation either directly or indirectly (i.e.,
after reflection from a mirror or shiny
surface).
The laser radiation has a high power density
and exposure may result in loss of sight.
22
Laser Label Indications
Attach the following warning
label to the side of the ZS-Lseries Sensor Head.
(60 X n) + 8
n: Number of gang-mounted Controllers (1 to 11)
READ AND UNDERSTAND THIS DOCUMENT
Please read and understand this document before using the products. Please consult your OMRON
representative if you have any questions or comments.
WARRANTY
OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a
period of one year (or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NONINFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY
BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE
PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS
ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS
OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH
CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which
liability is asserted.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY
WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS,
AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE
WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and
does not constitute a warranty. It may represent the result of OMRON's test conditions, and the users must
correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and
Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other
reasons.
It is our practice to change model numbers when published ratings or features are changed, or when
significant construction changes are made. However, some specifications of the product may be changed
without any notice. When in doubt, special model numbers may be assigned to fix or establish key
specifications for your application on your request. Please consult with your OMRON representative at any
time to confirm actual specifications of purchased products.
DIMENSIONS AND WEIGHTS
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS
REGARDING THE PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE
PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO
CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when
tolerances are shown.
ERRORS AND OMISSIONS
SUITABILITY FOR USE
The information in this document has been carefully checked and is believed to be accurate; however, no
responsibility is assumed for clerical, typographical, or proofreading errors, or omissions.
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED
OR RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY
COMPONENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for
OMRON's safety rated products.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the
combination of products in the customer's application or use of the product.
COPYRIGHT AND COPY PERMISSION
At the customer's request, OMRON will provide applicable third party certification documents identifying
ratings and limitations of use that apply to the products. This information by itself is not sufficient for a
complete determination of the suitability of the products in combination with the end product, machine,
system, or other application or use.
This document is protected by copyright and is intended solely for use in conjunction with the product.
Please notify us before copying or reproducing this document in any manner, for any other purpose. If
copying or transmitting this document to another, please copy or transmit it in its entirety.
OMRON shall not be responsible for the user's programming of a programmable product, or any
consequence thereof.
This document shall not be copied for sales or promotions without permission.
The following are some examples of applications for which particular attention must be given. This is not
intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the
uses listed may be suitable for the products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or
uses not described in this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical
equipment, amusement machines, vehicles, safety
equipment, and installations subject to separate industry or government regulations.
• Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
23
Broadening the Horizon by Combining Smart Sensors with Vision Technology
Sensor Amplifier
Sensor Head
with Ultra-High-Speed CCD Cameras
Smart Sensors
with Vision
Smart Sensors
ZFV
Versatile "2D Smart Sensors" are compatible with a
broad range of applications. The added visual
display delivers Sensors that can envision sensing
solutions. The "2D Smart Sensors" with CCD offer
new on-site vision capabilities.
OMRON Corporation
Regional Headquarters
Industrial Automation Company
OMRON EUROPE B.V.
Sensor Business Unit,
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49)7032-811-0/Fax: (49)7032-811-199
Application Sensors Division
Sensing Devices and Components Division H.Q.
Shiokoji Horikawa, Shimogyo-ku,
Kyoto, 600-8530 Japan
Tel: (81)75-344-7068/Fax: (81)75-344-7107
Authorized Distributor:
OMRON ELECTRONICS LLC
1 East Commerce Drive, Schaumburg, IL 60173 U.S.A.
Tel: (1)847-843-7900/Fax: (1)847-843-8568
OMRON ASIA PACIFIC PTE. LTD.
83 Clemenceau Avenue, #11-01, UE Square, 239920 Singapore
Tel: (65)6835-3011/Fax: (65)6835-2711
OMRON CHINA CO., LTD. BEIJING OFFICE
Room 1028, Office Building, Beijing Capital Times Square,
No. 88 West Chang'an Road, Beijing, 100031 China
Tel: (86)10-8391-3005/Fax: (86)10-8391-3688
Cat. No. Z215-E1-01 1004-5M (1004) (O) Printed in Japan
In the interest of product improvement, specifications are subject to change without notice.