octofluorocyclobutane (c4f8)

OCTOFLUOROCYCLOBUTANE (C4F8)
––– VLSI GRADE
TOTAL PURITY ≥99.999%
VLSI Grade Octofluorocyclobutane (99.999%) is our highest
purity grade for semiconductor applica ons. Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas.
SPECIFICATIONS
Acidity as HCl Fluorocarbons Nitrogen and Oxygen (N2 & O2) Water (H2O) HF < 0.1 ppmv < 4 ppmw < 4 ppmv < 1 ppmv ≤ 0.1 ppmv STANDARD PACKAGE INFORMATION—ASIA & NORTH AMERICA
Material Number Container Size Fill Weight (lbs) Fill Weight (kgs) Valve Connec on Cylinder Dimensions (in) 12358 44L Steel 88 39.916 Manual DISS 716 9x51 The informa on contained herein is oﬀered without charge for use by technically qualified personnel at their discre on and risk. All statements, technical informa on and recommenda ons contained herein are based on tests and data which we believe to be reliable, but the accuracy or completeness thereof is not guaranteed and no warranty of any kind is made with respect thereto. For more informa on, please contact us at: VERSUM MATERIALS, LLC
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